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A vacuum gauge calibration method and device for pressure measurement

A calibration method and vacuum gauge technology, applied in the direction of measuring devices, measuring fluid pressure, instruments, etc., can solve the problems of limited range and effect, relying on manual processing, time-consuming, etc., achieve intuitive and optional methods, reduce calibration workload, and operate concise effect

Inactive Publication Date: 2015-12-30
姚文利 +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In view of the above-mentioned prior art, the purpose of the present invention is to provide a vacuum gauge for pressure measurement and a vacuum gauge self-calibration method, which aims to solve the problem that the current range and effect of hardware adjustment are limited, and the existing method mainly relies on manual calibration. processing, time-consuming and cumbersome technical issues

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  • A vacuum gauge calibration method and device for pressure measurement
  • A vacuum gauge calibration method and device for pressure measurement
  • A vacuum gauge calibration method and device for pressure measurement

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Embodiment Construction

[0046] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0047]The calibration process uses a standard vacuum device that meets the specifications to provide the required calibration pressure Pa data within the regulatory working pressure range, and the output electrical signal of the corresponding regulatory measurement circuit is the measured data. Calibration uses the dynamic direct comparison method, the basic principle of which is to connect the vacuum gauge to be tested and the standard vacuum gauge to the same calibration chamber, the pressure required by the chamber is obtained through dynamic balance adjustment, and the fine-tuning needle valve is used to adjust the pressure of the calibration chamber. Use a standard vacuum gauge as a monitor.

[0048] Such as figure 1 The shown self-calibrating vacuum gauge system device consists of regulation, regulation work and detection circuit, data i...

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Abstract

The invention discloses a method and device for calibrating a vacuum gauge for measuring pressure. The method mainly comprises data inputting, self-calibrating for data generating and field calibrating and amending. The calibrating device mainly comprises a thermal conductance type gauge tube, a gauge tube working and detecting circuit, a multi-channel analog-digital conversion circuit and a data inputting and processing circuit. An electrical signal of the thermal conductance type gauge tube is output by a gauge tube heating measuring circuit in the gauge tube working and detecting circuit, then is matched through an amplifying circuit in a data inputting and processing circuit and an analog multi-way switch to be transmitted to the analog-digital conversion circuit to be converted into a digital signal, and the digital signal is processed by a microprocessor to be transmitted to a displayer to be displayed or to a memorizer to be stored. According to the method and device, the data are input and automatically amended with simple operation, the method for amending the data is visual, selectable and wide in application range, and the indicating value is amended fast.

Description

technical field [0001] The invention relates to the technical field of vacuum measurement, in particular to a method and device for calibrating a vacuum gauge used for pressure measurement. Background technique [0002] A vacuum gauge (Vacuum Gauge), also known as a vacuum gauge, is an instrument for measuring vacuum or air pressure. Generally, the air pressure is measured by using the change of a certain physical effect of the gas under different air pressures. It is widely used in scientific research and industrial production. [0003] Calibration of vacuum gauges is a common task in the manufacture and use of vacuum gauges. Vacuum gauges are usually composed of gauges and instrument circuits. Different types of gauges are suitable for different vacuum degrees. For example, ionization gauges and cold gauges are suitable for high vacuum, and thermal conductivity gauges are used for low vacuum. The combination of two or more can realize the measurement from low to high vac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L27/00
Inventor 姚文利
Owner 姚文利
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