Method for observing and measuring interfacial fracture toughness of fragile film on hard substrate
A technology of observation, measurement and fracture toughness, applied in the field of nanomaterials, it can solve the problems of micro-cracks, difficult to observe, etc., and achieve the effect of precise interface fracture toughness
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[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0029] figure 1 Show the flow chart of the method for observing and measuring the interface fracture toughness of brittle thin film on hard substrate of the present invention, as shown in the figure, the present invention is realized in this way, the present invention is carried out with the TiN thin film deposited on Si substrate as example Instructions, including:
[0030] S101, performing a nanoindentation test on a TiN film with a thickness of 500nm deposited on a Si substrate, and obtaining an indentation loading-unloading curve when the indentation depth is 1000nm;
[0031] S102, scan the i...
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