High-capacity precision two-dimensional motion platform
A two-dimensional motion platform, high load-bearing technology, applied in the direction of large fixed members, electrical components, circuits, etc., can solve the problem that the accuracy cannot meet the high precision, achieve low friction, simple structure, and solve the problem between bearing capacity and accuracy. contradictory effect
Active Publication Date: 2016-01-20
CHINA ELECTRONIC TECH GRP CORP NO 2 RES INST
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Problems solved by technology
[0003] The invention provides a high-load precision two-dimensional motion platform, which solves the technical problem that the motion guidance accuracy of the existing two-dimensional motion platform cannot meet high precision under high load
Method used
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[0010] The present invention is described in detail below in conjunction with accompanying drawing:
[0011] A high-load precision two-dimensional motion platform, including a marble base plate 1, a transverse guide rail 2 is arranged on the marble base plate 1, a transverse guide rail movable slider 3 is arranged on the transverse guide rail 2, and the marble on the outside of the transverse guide rail 2 The base plate 1 is provided with a transverse driving device 4, the screw nut of the transverse driving device 4 is fixedly connected with the movable slider 3 of the transverse guide rail, and the top crossbeam of the T-shaped laterally moving stand 5 is fixedly arranged on the movable slider 3 of the transverse guide rail. The bottom end of the longitudinal beam of the T-shaped laterally movable platform 5 is fixedly provided with supporting walking wheels 15, and a longitudinal guide rail 6 and a longitudinal driving device 8 are respectively arranged on the T-shaped later...
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The invention discloses a high-bearing-capacity precise two-dimensional motion platform. The high-bearing-capacity precise two-dimensional motion platform solves the problem that the motion guide precision of an existing two-dimensional motion platform under high loading can not meet the requirement for high precision. The high-bearing-capacity precise two-dimensional motion platform is characterized in that a transverse guide rail (2) and a transverse guide rail movable sliding block (3) are arranged on a marble base plate (1), a top end transverse beam of a T-shaped transverse moving rack (5) is fixedly arranged on the transverse guide rail movable sliding block, a supporting walking wheel (15) is fixedly arranged at the bottom end of a longitudinal beam of the T-shaped transverse moving rack, a longitudinal guide rail (6) and a longitudinal driving device (8) are arranged on the T-shaped transverse moving rack, one side edge of a rectangular moving frame (9) is fixedly connected to a longitudinal guide rail movable sliding block, an air-bearing table (12) is movably arranged in the rectangular moving frame, and an air-bearing table base (16) of the air-bearing table is movably arranged on the marble base plate. The high-bearing-capacity precise two-dimensional motion platform eliminates the influence of high loading on the guide precision of guide rails and solves contradictions between the bearing capacity and precision of a locating platform.
Description
technical field [0001] The invention relates to a high-bearing precision XY motion platform, which is applied in the field of precision machinery, especially electronic special equipment, and is a high-bearing capacity high-precision motion positioning platform. Background technique [0002] On the high-precision flip-chip bonding machine, the two-dimensional motion platform is the key equipment. This device needs to achieve accurate alignment of the chip and the substrate, and at the same time bear a maximum pressure of 150 kg. Existing precision two-dimensional motion platforms are all set on linear guide rails. The linear guide rails are responsible for both precise guidance and the weight of the platform and the work pieces on the platform. When the motion platform is under high load, there is a problem that the motion guidance accuracy cannot be satisfied. question. Contents of the invention [0003] The invention provides a high-load precision two-dimensional motion...
Claims
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IPC IPC(8): B23Q1/38B23Q1/46
CPCH01L21/67138
Inventor 王晓奎曹国斌王贵平狄希远吕琴红姬臻杰张志耀霍灼琴杨凯骏杨卫王海珍田志峰马生生孙丽娜
Owner CHINA ELECTRONIC TECH GRP CORP NO 2 RES INST