Flexible multifunctional vacuum coating equipment and its intelligent control system

Abstract

The invention relates to flexible and multifunctional vacuum coating equipment and an intelligence control system, comprising a vacuum chamber, which is characterized in that: the vacuum chamber is composed of a vacuum chamber cavity and a vacuum chamber door, and the vacuum chamber is of a multilateral prism- or cylinder-shaped seal structure; one or more connection port are arranged in the vacuum chamber, and one or more rectangular flange holes are arranged on a side vertical face of the vacuum chamber; an easily-assemble and -disassemble type rectangular flange plate is arranged at the rectangular flange holes, and a target stand connection hole is arranged in the rectangular flange plate, to compose a flexible connection mechanism; a baffle plate device is arranged at the target stand connection hole part, target stands with different manners are assembled by the target stand connection hole, and easily-assemble and -disassemble type target stand connection mechanisms with a plurality of different manners and module devices with different functions are formed on the rectangular flange plate; and a plurality of modularization device compose modularization multifunctional coating equipment, to implement equipment flexibility configuration. By different target material combinations and the intelligence control system, the equipment implements multiple composite coating and nanometer coating technology, and has a beneficial effect for raising coating performances.

Description

technical field [0001] The invention relates to a vacuum coating equipment, in particular to a flexible multifunctional vacuum coating equipment and its intelligent control system, which belongs to the field of vacuum plasma coating technology and equipment. technical background [0002] Arc ion plating and magnetron sputtering are two common vacuum plasma coating technologies, and they are complementary to a certain extent. For example, arc ion plating has a faster deposition rate and good bonding force, while magnetron sputtering Plating has a high surface finish. Because of this, the fields of application of the former two are different. In recent years, with the improvement of product requirements, the application of magnetron sputtering plating and arc ion plating on one product has gradually increased. On the other hand, in order to improve the coating performance, some products need to introduce some plasma heat treatment related technologies during the coating proc...

AI Technical Summary

Problems solved by technology

[0003] One of the purposes of the present invention is to solve the defect of single structure and function in the vacuum plasma coating equipment of the prior art, introduce a flexible mechanism, improve the ability of the system to adapt to changes in the internal and external environments, and provide a flexible multi-functional vacuum coating equipment

Images