Hydrostatic gas bearing spindle
A static pressure gas bearing and spindle technology, which is applied to large fixed members, metal processing machinery parts, metal processing equipment, etc., can solve problems such as thermal expansion, and achieve the effect of suppressing position changes
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Embodiment approach 1
[0049] First, the configuration of the static pressure gas bearing main shaft according to Embodiment 1 of the present invention will be described.
[0050] Such as figure 1 and figure 2 As shown, the static pressure gas bearing spindle of this embodiment is a static pressure gas bearing spindle fixed to the installation surface PS. The static pressure gas bearing main shaft mainly has a rotating shaft 1 , a housing 2 , a first fixed table 3 and a second fixed table 4 .
[0051]The rotary shaft 1 has a mounting surface 1 a on an end surface on which a workpiece can be mounted. Housing 2 is separated by a bearing gap for supplying bearing gas (refer to image 3 ) to surround the outer peripheral surface of the rotating shaft 1, and the bearing uses gas to support the rotating shaft 1 so as to be rotatable.
[0052] The first fixing table 3 and the second fixing table 4 are spaced apart from each other along the axis AX direction of the casing 2 . The first fixed platform ...
Embodiment approach 2
[0095] Embodiment 2 of the present invention has the same configuration as Embodiment 1 unless otherwise specified, and therefore the same elements are denoted by the same symbols and descriptions thereof will not be repeated.
[0096] In Embodiment 1, the structure in which the displacement due to thermal expansion is released in a direction that does not affect it was described, but it is also applicable to the structure in which the amount of displacement itself due to thermal expansion is also suppressed.
[0097] look again figure 1 , Some or all of the components of the static pressure gas bearing main shaft of this embodiment are made of a material with a low thermal expansion coefficient (low thermal expansion material). Specifically, the first fixed platform 3 and the second fixed platform 4 preferably use a thermal expansion coefficient of 8×10 -6 / K or less materials. Especially the second fixed table 4 is preferably 8 * 10 with a coefficient of thermal expansion....
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