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Transport vehicle for automatic material transport system

A material transfer system and transfer vehicle technology, which is applied in the field of transfer vehicles in the automatic transfer system of silicon wafer boxes, can solve problems such as reducing transfer efficiency, and achieve the effects of improving transfer efficiency, increasing the number of loads, and improving transfer methods and efficiency

Inactive Publication Date: 2014-04-02
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Generally speaking, a silicon wafer box is transported between the circulation and the machine and the storage device or between the machine and the machine by a transport vehicle. Since there are multiple transport vehicles on the track at the same time, when the silicon wafer box When the starting point and the end point are far away, the transport vehicle that transports it needs to go through a long track section, and it may encounter other transport vehicles and be forced to stop or take a detour, which reduces the transport efficiency to a certain extent

Method used

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  • Transport vehicle for automatic material transport system
  • Transport vehicle for automatic material transport system
  • Transport vehicle for automatic material transport system

Examples

Experimental program
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Effect test

no. 1 example

[0019] see figure 1 In this embodiment, the transport vehicle 1 used in the automated material transport system is suspended on the track 9 of the system, and it includes a vehicle body 11, a control unit (not shown) in the vehicle body, wheels 12 on the top of the vehicle body, and lifts at the bottom of the vehicle body device.

[0020] Wherein, the lifting device includes a first telescopic mechanical arm 13 and a second telescopic mechanical arm 14, and the first telescopic mechanical arm 13 and the second telescopic mechanical arm are respectively fixed on the front and rear sides of the vehicle body through the first turntable 15 and the second turntable 16. , and can be rotated horizontally. The first telescopic mechanical arm 13 is formed by a foldable connection between a first front straight arm 131 and a first rear straight arm 132. The end of the first front straight arm 131 is provided with a first picking and placing gripper 133 for picking and placing silicon w...

no. 2 example

[0025] In this embodiment, the settings of the vehicle body, the control unit, the wheels, and the two telescopic mechanical arms are all the same figure 2 As shown in , but different from the first embodiment, the two telescopic mechanical arms are not fixed on two turntables respectively, but are fixed on a large turntable at the same time, and the large turntable is fixed on the bottom of the vehicle body and can rotate horizontally . Through such an arrangement, the front and rear positions of the two telescopic robotic arms can be exchanged, so that the silicon wafer box grabbed by the rear telescopic robotic arm can be transferred to the transport vehicle in front of the transport vehicle.

no. 3 example

[0027] In this embodiment, on the basis of the first embodiment, a large turntable is added, that is, the first turntable and the second turntable are fixed on a large turntable at the same time and can rotate horizontally, and the large turntable is fixed on the bottom of the vehicle body and can be rotated horizontally. Rotate horizontally. Through such a setting, the flexibility of the mechanical arm can be further increased, and the transport efficiency of the transport vehicle can be improved.

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Abstract

The invention discloses a transport vehicle for an automatic material transport system. The transport vehicle comprises a vehicle body, a control unit in the vehicle body, wheels at the top of the vehicle body and a lifting device at the bottom of the vehicle body, wherein the lifting device comprises two telescopic mechanical arms which are respectively fixed on the front side and the rear side of the bottom of the vehicle body through a rotating device and capable of horizontally rotating; the tail ends of the two telescopic mechanical arms are provided with silicon wafer box fetching / placing components. By arranging the two telescopic mechanical arms, the carrying quantity of silicon wafer boxes can be increased, and the silicon wafer boxes can be transmitted between the two telescopic mechanical arms and transmitted to a next transport vehicle, and the transfer efficiency is improved; by arranging the rotating device, the telescopic directions of the telescopic mechanical arms or the front position and rear position of the silicon wafer boxes can be interchanged, and the transfer mode and efficiency of the transport vehicle are improved.

Description

technical field [0001] The invention relates to the technical field of material conveying equipment for semiconductor integrated circuits, in particular to a conveying vehicle in an automatic conveying system for silicon wafer boxes. Background technique [0002] With the development of semiconductor technology, 300mm silicon wafers have gradually replaced 200mm silicon wafers and become the mainstream, and the weight of each silicon wafer box loaded with silicon wafers has also changed from about 4 kg to about 9 kg. Therefore, manual transport is still carried by manpower, which not only reduces efficiency, but also has the possibility of personal injury of the transporter. At the same time, semiconductor manufacturing has increasingly stringent requirements on plant utilization and production cycle, and the importance of Automated Material Handling Systems (AMHS) as a link to transport silicon wafers between various manufacturing modules is also increasing. stand out. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B66C11/10B66C1/10
Inventor 钱刚
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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