A kind of preparation method of bulge sample of layered electromagnetic thin film material

A thin-film material and electromagnetic technology, applied in the field of electromagnetic thin-film functional materials, can solve problems such as filling material components and formulas that cannot be satisfied, and achieve high sample preparation efficiency, high efficiency, and good stability.

Active Publication Date: 2016-05-11
湖南新生代新材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in the traditional bulge sample preparation method, the ingredients and formulations of the filling materials used cannot meet the above requirements

Method used

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  • A kind of preparation method of bulge sample of layered electromagnetic thin film material
  • A kind of preparation method of bulge sample of layered electromagnetic thin film material
  • A kind of preparation method of bulge sample of layered electromagnetic thin film material

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Embodiment Construction

[0027] The present invention will be further described in detail below in conjunction with specific embodiments.

[0028] The technical scheme adopted by the present invention to solve the above-mentioned technical problems is as follows: firstly, a through hole with a specified diameter is drilled on the silicon dioxide substrate with a micro-drilling machine. Then put the substrate flat on a glass sheet, pour special filling material into the through hole, and gradually tamp it with tools until it is flush with the upper surface of the substrate. Then the lower surface of the substrate is metallographically treated and polished so that the filling material and the lower surface of the substrate are strictly in the same plane. Then another silicon wafer with a specific diameter is used to cover the filling material, and a platinum layer with a thickness of about 5 nanometers is deposited on its surface by magnetron sputtering method as the bottom electrode. Then remove the s...

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Abstract

The invention discloses a filling material for manufacturing a layered electromagnetic thin film material swelling sample and a method for preparing the filling material, and provides a method for adopting the filling material to manufacture the layered electromagnetic thin film material swelling sample. The method includes the steps that firstly, a through hole is machined in a silicon dioxide substrate through a precision micromachining method; the through hole is filled with a specially-made mixing material, and metallographic phase polishing processing is conducted on the through hole; the surface of the substrate is plated with an annular bottom electrode through an ion sputtering method, a ferroelectric thin film and a ferromagnetic thin film are sequentially deposited through a sol-gel method, annealing is conducted, and an annular top electrode is deposited on the surfaces of the thin films after being cleaned and dried; acetone analytical reagents and a sodium hydroxide solution are used for corrosion to remove the filling material in the through hole, an independently-supported thin film window is formed, and then the electromagnetic thin film swelling sample suitable for a swelling test is obtained. The method is easy and convenient to operate and high in manufacturing efficiency, and the manufacturing method of the layered electromagnetic thin film material swelling sample is suitable for the swelling test.

Description

technical field [0001] The invention belongs to the sample preparation method in the technical field of electromagnetic thin film functional materials, and specifically relates to the development of a suitable special filling material for the inner hole of the substrate on the basis of the traditional bulging sample preparation, and then adopts the sol-gel method to prepare a layered electromagnetic thin film material, and finally removes the Material filled in the substrate, to obtain a bulge sample with independent support windows. Background technique [0002] Layered electromagnetic thin film functional materials are functional / smart materials with special magnetoelectric coupling response characteristics. Due to the heterogeneity, force-electromagnetic fully coupled physical-mechanical behavior, multi-scale interface coupling and many other superior properties, this kind of material has been widely used in aerospace, micro-electro-mechanical systems, optoelectronics, in...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L43/12
Inventor 毛卫国肖敏戴翠英丁佳谢敏周望邓水凤裴永茂方岱宁
Owner 湖南新生代新材料科技有限公司
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