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Free surface shape reconstruction method for nonzero-digit TWI system

An interference system, non-zero technology, applied in the direction of using optical devices, instruments, measuring devices, etc., can solve problems such as limitations

Active Publication Date: 2014-06-11
NANJING UNIV OF SCI & TECH
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Problems solved by technology

But in the face of optical free-form surfaces, especially those surfaces that cannot be accurately described by polynomials, the use of this method is limited

Method used

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  • Free surface shape reconstruction method for nonzero-digit TWI system
  • Free surface shape reconstruction method for nonzero-digit TWI system
  • Free surface shape reconstruction method for nonzero-digit TWI system

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Experimental program
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Embodiment 1

[0069] The validity and accuracy of the algorithm will be verified through simulation experiments.

[0070] The basic idea of ​​the simulation verification experiment is: use the calculation to generate a virtual wave surface technology to obtain an ideal interference wave surface W of the DUT with a known surface shape nom . Then use a random function to superimpose an artificial surface error on the surface shape of the test piece, and record the surface error data ΔW error . Then use the calculation to generate virtual wavefront technology to obtain the interference wavefront W of the DUT that has been superimposed with the surface shape error rea , which is used as the wavefront obtained by the interference system to test the actual DUT. Then, the surface shape deviation ΔW' of the test piece is obtained by using the surface shape reconstruction algorithm proposed by the present invention that can eliminate the return error error . Finally, the wave surface ΔW error ...

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Abstract

The invention discloses a free surface shape reconstruction method for a nonzero-digit TWI system. The method puts forward a hysterisis error reverse elimination algorithm based on analysis of a testing optical path of the nonzero-digit TWI system through the perturbation theory and Hamilton characteristic functions. Meanwhile, the virtual wave calculation and generation technology is applied to the nonzero-digit TWI system, so that the problem that how to inverse the surface shape of a part to be tested through a collected array interferogram in a high-precision mode is solved. Besides, an iterative algorithm is put forward and used for the final solution of the surface shape in the solution process of the actual surface shape of the part to be tested.

Description

technical field [0001] The invention belongs to the field of optical precision testing, and in particular relates to a free-form surface shape reconstruction method for an inclined wavefront non-zero interference system, which can calculate and reconstruct interference fringes obtained from the inclined wavefront non-zero interference system with high precision The shape of a freeform surface. Background technique [0002] Optical free-form surface elements can not only correct various aberrations, but also simplify the structure of the optical system and significantly improve the performance of the optical system. Therefore, they are widely used in the fields of lighting, display, and biomedicine. However, its excessive "degrees of freedom" make it very difficult to process and detect such components with high precision, which restricts its application and promotion in the imaging field. The precise detection of surface shape of free-form surface optical elements has becom...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 沈华李嘉朱日宏王念陈磊高志山
Owner NANJING UNIV OF SCI & TECH
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