A force feedback precision support device for mounting optical components

Abstract

The invention relates to a force feedback precision support device for clamping optical elements, which comprises a base (1), a main support (2), an auxiliary support (3) and a control system (4). The main support (2) and the auxiliary support (3) are arranged around and fixed on the base (1). The main support (2) is three rigid fulcrums; several auxiliary supports (3) are evenly distributed between the main supports (2), and can move up and down. The auxiliary support (3) specifically includes an auxiliary support bracket, a jack, a flexible member, and a force sensor. The invention adopts the control system to control the action of the jacking device, pushes the flexible parts to deform, and drives the auxiliary support point to move; the support force is obtained by the feedback of the force sensor, and the low deformation of the optical element can be realized through the closed-loop control of each auxiliary support force , Stable support.

Description

technical field [0001] The invention relates to the technical field of supporting devices for optical components, in particular to a force feedback precision supporting device for clamping optical components. Background technique [0002] The surface accuracy of optical components is an important factor in determining the performance of optical systems. After optical-mechanical assembly, the deformation of the optical element due to force during the positioning and clamping process will introduce systematic errors in the processing, testing, and use stages. For most conventional optical systems, due to the surface shape of the lens The index requirements are not high. Relatively speaking, the impact of this error on the image quality of the optical system can generally be ignored or easily overcome. However, for precision optical engineering, such as large-aperture space mirrors, high-precision interferometers, and lithographic projection objectives, the size and quality of...

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Problems solved by technology

[0004] Based on the analysis of the above representative literature, it can be seen that although multi-point support is beneficial to reduce the deformation of the mirror surface, there is uncertainty in the support force of each support point due to over-positioning, and the support force decreases with time due to creep, stress release, and changes in environmental conditions. The problem of slow instability over time, the final actual effect of the above embodiment always deviates from the ideal design level

In addition, considering that the optical components may need to be loaded repeatedly (such as detection applications), due to the lack of ability to ensure high reproducibility of the support force at each point during each loading, resulting in the introduction of non-negligible surface shape errors, the above supports are selected device is insufficient

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