Planar piezoelectric-driven platform with three degrees of freedom and method for driving planar piezoelectric-driven platform to move

Abstract

The invention discloses a planar piezoelectric-driven platform with three degrees of freedom and a method for driving the planar piezoelectric-driven platform to move, and belongs to the field of precision driving technologies. The planar piezoelectric-driven platform comprises a function platform, piezoelectric driving modules, an elastic plate and a fixed platform. The function platform is used for carrying and positioning objects and is connected with the piezoelectric driving modules; each piezoelectric driving module comprises two piezoelectric stacks, a displacement amplification mechanism, connecting plates, a fixing bolt and pretension force bolts; the elastic plate is connected with the piezoelectric driving modules by the fixing bolts; the fixed platform is used as a support platform for the elastic plate and is arranged on the lower side of the elastic plate. The planar piezoelectric-driven platform and the method have the advantages that specific driving signals are respectively transmitted to the piezoelectric driving modules which are arranged on the elastic plate to form a square respectively, so that traveling waves which run in different directions can be stimulated on the elastic plate, and the function platform with three degrees of freedom can move; errors such as hinge gaps due to traditional mechanical transmission can be prevented, and a large-stroke and high-precision target positioning effect can be realized.

Description

technical field [0001] The invention belongs to the technical field of precision driving, and relates to a driving positioning device, in particular to a plane three-degree-of-freedom piezoelectric driving platform. Background technique [0002] At present, the hinge gap error is the main reason for the low positioning accuracy of the planar motion platform, so it is difficult for the platform to meet the nano-level positioning requirements. Although the gap error problem between hinges can be reduced to a certain extent by using the compliant mechanism of the flexible hinge, but limited by the limited flexible deformation of the flexible hinge, the working space of the positioning platform is small (generally only micron-level working space can be realized) . Therefore, in view of the above two technical problems, the present invention utilizes the precise drive output of the piezoelectric stack and cooperates with the displacement amplification mechanism to realize the tr...

AI Technical Summary

Problems solved by technology

[0002] At present, the hinge gap error is the main reason for the low positioning accuracy of the planar motion platform, so it is difficult for the platform to meet the nano-level positioning requirements

Although the gap error between the hinges can be reduced

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