A vacuum chamber for graphene preparation with visualization of growth process

Abstract

The invention discloses a vacuum chamber with a visual growth process for preparing graphene, and relates to preparation of graphene. The vacuum chamber comprises a cavity, upper and lower viewing ports, a clamping device, and intake and exhaust valves, wherein the upper and lower viewing ports are welded with the cavity through upper and lower viewing port flanges, respectively; a sealing flange is arranged at the top of the cavity; an annular groove is formed in the sealing flange; an upper viewing port flange sealing ring is arranged inside the groove; an upper viewing port flange is connected with the sealing flange; an upper cavity flange is arranged on the upper viewing port flange; the upper viewing port flange is welded with the upper cavity flange; the upper viewing port sealing ring is arranged on the upper viewing port flange; a top flange is arranged on and connected with the upper cavity flange; pressing clips, bolts and threaded studs are arranged on the clamping device; one ends of the pressing clips are fixed on a lower viewing port flange by the bolts and the threaded studs; the intake and exhaust valves are respectively arranged on the lateral wall of the cavity; a lower cavity flange is welded below the lower viewing port flange; a lower viewing port sealing ring is arranged below the lower cavity flange; a bottom flange is welded at the bottom of the lower cavity flange.

Description

technical field [0001] The invention relates to the preparation of graphene, in particular to a vacuum chamber for graphene preparation with a visible growth process. Background technique [0002] With the rapid development of science and technology, great progress has been made in the development of vacuum chambers. The main function of vacuum chambers is to provide a stable vacuum environment for the entire process. Therefore, the development of vacuum chambers must not only meet the design requirements, but also ensure that The reliability of the process, while taking into account the rationality, economy and applicability. On June 25, 2002, Huang Bencheng, Chen Jinming, Qi Yan, and Huang Wei published "Vacuum Vessel Design" in the journal of CNKI, and on June 1, 2007, Zhang Liyuan of Tianjin University published a master's thesis "Vacuum Vessel for Special Film Formation Equipment The vacuum chamber designed on pages 21 to 24 of Design and Finite Element Analysis is rel...

AI Technical Summary

Problems solved by technology

[0003] Through summarizing the application of vacuum chambers in other aspects, it can be seen that the scale and size of existing vacuum chambers are getting larger and larger, and the external interfaces are gradually increasing. From cylindrical to rectangular box structures, etc., the development of the entire vacuum chamber mostly presents large and complex Features, adding more uncertain factors, potentially unpredictable effects on the quality of graphene preparation, and poor portability, cannot be applied to different experimental platforms

[0004] Due to the unique properties and broad application prospects of graphene, there has been an upsurge of research on graphene. Although the method of preparing graphene by chemical vapor deposition is becoming more and more mature, due to its high energy consumption and inability to be flexibly applied to IC device processing, the invention of a A vacuum chamber for the preparation of graphene with a visible growth process has become a need, which can observe the growth of graphene in real time and study the growth principle of graphene

Therefore, the large scale, no clamping device and invisible in the traditional vacuum chamber design have always been the biggest problems that plague the preparation personnel.

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