Microwave and plasma interacting device in magnetic plasma under condition that magnetic field and electric field are perpendicular
A plasma, mutually perpendicular technology, applied in the direction of plasma, electrical components, etc.
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specific Embodiment approach 1
[0010] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the microwave and plasma interaction device in the magnetized plasma under the condition that the magnetic field and the electric field in this embodiment are perpendicular to each other, it includes a microwave generator 1, a ferrite isolator 2, an attenuator 3, and a directional coupler 4. Waveguide 5, insulating microwave window 6, vacuum cavity 7, multiple solenoids 8, diaphragm 9, plasma source 10, two Langmuir probes 11, cut-off tube 12, matching microwave load 13, ring Antenna 14, magnetic probe 15, electrostatic probe 16, multi-grid probe 17 and plasma observer 18;
[0011] The microwave generator 1, the ferrite isolator 2, the attenuator 3 and the directional coupler 4 are connected successively, and connected to the waveguide 5 after turning at an angle of 90°. The upper end of the waveguide 5 is provided with an insulating microwave window. 6. The end of the wavegu...
specific Embodiment approach 2
[0013] Specific implementation mode two: the following combination figure 1 This embodiment will be described. This embodiment will further describe the first embodiment. The section of the cavity of the waveguide 5 is rectangular.
specific Embodiment approach 3
[0014] Specific implementation mode three: the following combination figure 1 This embodiment will be described, and this embodiment will further describe the first embodiment, the solenoids 8 are arranged around and around the outside of the vacuum chamber 7 at equal intervals.
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