Microwave and plasma interacting device in magnetic plasma under condition that magnetic field and electric field are perpendicular

A plasma, mutually perpendicular technology, applied in the direction of plasma, electrical components, etc.

Active Publication Date: 2014-08-06
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the existing technology does not have a microwave-plasma interaction device under the condition of different magnetized p

Method used

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  • Microwave and plasma interacting device in magnetic plasma under condition that magnetic field and electric field are perpendicular

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specific Embodiment approach 1

[0010] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the microwave and plasma interaction device in the magnetized plasma under the condition that the magnetic field and the electric field in this embodiment are perpendicular to each other, it includes a microwave generator 1, a ferrite isolator 2, an attenuator 3, and a directional coupler 4. Waveguide 5, insulating microwave window 6, vacuum cavity 7, multiple solenoids 8, diaphragm 9, plasma source 10, two Langmuir probes 11, cut-off tube 12, matching microwave load 13, ring Antenna 14, magnetic probe 15, electrostatic probe 16, multi-grid probe 17 and plasma observer 18;

[0011] The microwave generator 1, the ferrite isolator 2, the attenuator 3 and the directional coupler 4 are connected successively, and connected to the waveguide 5 after turning at an angle of 90°. The upper end of the waveguide 5 is provided with an insulating microwave window. 6. The end of the wavegu...

specific Embodiment approach 2

[0013] Specific implementation mode two: the following combination figure 1 This embodiment will be described. This embodiment will further describe the first embodiment. The section of the cavity of the waveguide 5 is rectangular.

specific Embodiment approach 3

[0014] Specific implementation mode three: the following combination figure 1 This embodiment will be described, and this embodiment will further describe the first embodiment, the solenoids 8 are arranged around and around the outside of the vacuum chamber 7 at equal intervals.

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Abstract

The invention relates to a microwave and plasma interacting device in magnetic plasma, in particular to a microwave and plasma interacting device in magnetic plasma under the condition that a magnetic field and an electric field are perpendicular. The microwave and plasma interacting device aims to solve the problem that no microwave and plasma interacting device under the characteristic situation of the different magnetic plasma exists in the prior art. The microwave and plasma interacting device comprises a microwave generator, a ferrite isolator, an attenuator, a directional coupler, a waveguide tube, an insulation microwave window, a vacuum cavity, a plurality of solenoids, a diaphragm, a plasma source, two Langmuir probes, a cut-off tube, a matching microwave load, a loop antenna, a magnetic probe, an electrostatic probe, a multiple-grid probe and a plasma visualizer, wherein the plasma source is a sparking plasma source, generated sparking voltage is used for controlling the density of the plasma, and the attenuator is used for adjusting microwave power. The microwave and plasma interacting device is used for researching the interaction between the microwave and the plasma under the characteristic condition of the different magnetic plasma.

Description

technical field [0001] The invention relates to a microwave and plasma interaction device in magnetized plasma. Background technique [0002] In 1879, Sir William Crookes classified plasma as the fourth state of matter. According to this point of view, when a substance is heated from a low temperature, it gradually melts from a solid to a liquid, and then evaporates to a gas. Finally, if the heating is continued further, the temperature rises, and the individual atoms will split into many electrons and positively charged ions, forming the fourth state of matter, plasma. The term plasma was proposed by Irving Langmuir in 1982, which means an approximately electrically neutral collection of ions and electrons. It may, but does not have to contain a background neutral gas, which responds to electric and magnetic fields. The main feature of plasma that is different from ordinary gas and ordinary ionized gas is that the particles in this collective interact with each other thr...

Claims

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Application Information

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IPC IPC(8): H05H1/00H05H1/18
Inventor 江滨浩韩雪
Owner HARBIN INST OF TECH
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