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Crucible

A crucible and sub-cavity technology, applied in the field of evaporation, can solve problems such as drifting, material leakage, and cost increase, and achieve the effects of avoiding leakage, uniform quality, and convenient cleaning

Active Publication Date: 2014-08-20
BOE TECH GRP CO LTD +1
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  • Abstract
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Problems solved by technology

But the inventor finds that because the length of the crucible is longer, there are at least the following problems: 1. When the evaporation material is loaded, the operator needs to add the material while moving in order to evenly load the material in the main cavity 10 of the crucible. It is easy to cause material leakage, drift and loss, and OLED evaporation materials are very expensive, which leads to an increase in cost
2. The existing OLED evaporation materials are in the form of powder, and the uniform distribution of the material in the main cavity 10 of the crucible cannot be controlled during filling, which may easily cause differences in the film thickness of the evaporation film; 3. The existing weighing balance cannot accurately measure the crucible 4. The attached material in the main cavity 10 of the crucible is not easy to clean after evaporation

Method used

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Embodiment 1

[0023] combine figure 2 , 3 As shown in , 4, this embodiment provides a crucible, which includes a crucible main cavity 10, and a plurality of crucible sub-cavities 30 arranged in the crucible main cavity 10 for containing evaporation materials.

[0024] The crucible in this embodiment includes several crucible sub-cavities 30. Since the volume of the crucible sub-cavities 30 is relatively small relative to the crucible main cavity 10, when the crucible sub-cavities 10 are used to hold evaporation materials, the operator will There is no need to move and fill the vapor deposition material, thereby avoiding leakage, drift and loss of the vapor deposition material; meanwhile, the volume of the crucible sub-cavity 30 is small, so the mass of the vapor deposition material loaded can be weighed more accurately by using a balance, In order to ensure that the quality of the evaporation material loaded into the crucible sub-cavity 30 is more uniform; of course, because the volume of...

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Abstract

The invention provides a crucible, and belongs to the technical field of vapor plating. The problems of vapor plating material waste in a vapor plating technology, inconvenient cleaning, and non-uniformity of the vapor plating material of present crucibles are solved. The crucible comprises a crucible main cavity, and a plurality of crucible subcavities arranged in the crucible main cavity and used for containing the vapor plating material. The crucible can be used for making OLED devices.

Description

technical field [0001] The invention belongs to the technical field of vapor deposition, and in particular relates to a crucible. Background technique [0002] Evaporation method is a vacuum coating technology of physical vapor deposition. It puts the evaporation material in a crucible, and by heating the crucible, the material is converted from solid state to gaseous atoms, atomic groups or molecules, and then condenses to the surface of the substrate to be coated to form a thin film. [0003] The evaporation process in the manufacture of OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) display devices uses a linear evaporation source, and the core component of the linear evaporation source is a crucible. The crucible used in the vapor deposition process in the production of the existing OLED display device is designed as an integrated pouring crucible, and its length is about 0.8m (taking the 5.5 generation line as an example). Such as figure 1 As shown...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/243C23C14/12C23C14/246
Inventor 肖昂
Owner BOE TECH GRP CO LTD
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