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Multiple coating device for strip substrates and strip substrate vacuum coating apparatus

A multi-layer coating and substrate technology, applied in coating, vacuum evaporation plating, metal material coating process, etc., can solve the problems of expensive structure, unable to replace the reel, cumbersome and other problems, and achieve the effect of keeping the structure simple

Inactive Publication Date: 2014-08-20
VON ARDENNE ANLAGENTECHNIK GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In other known coating plants, the unwinder and winder are arranged inside the process chamber, which has the advantage that a separate reel chamber is not required, but also has the disadvantage that it is not possible without ventilation of the entire process chamber change reel
[0014] Here, in addition to the costly structure, the process is very tedious and time-consuming

Method used

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  • Multiple coating device for strip substrates and strip substrate vacuum coating apparatus
  • Multiple coating device for strip substrates and strip substrate vacuum coating apparatus
  • Multiple coating device for strip substrates and strip substrate vacuum coating apparatus

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Embodiment Construction

[0045] exist Figure 1 to Figure 3 The multilayer coating device shown in (not shown here) for the surface coating of strip-shaped substrates, such as plastic films, comprises a multilayer coating device with an axis of rotation 11 and for enclosing more than 180° around a peripheral side 12 The cooling roller 1 of the cylindrical peripheral side 12 of the strip-shaped substrate is guided in a partially circumferential cooling manner. For this purpose, the strip-shaped substrate is introduced from the upper left into the gap 13 between the cooling roller 1 and the arrangement of the treatment device 4 in the process chamber of the strip-shaped substrate vacuum coating system. The strip-shaped substrate passes through the gap 13 and is thus guided on the periphery of the cooling roll 1 .

[0046] The arrangement of a total of four treatment devices 4 , each configured as a sputter magnet control, with coating devices each pointing toward the peripheral side 12 , is distributed...

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Abstract

The invention relates to a multiple coating device for coating the surface of a strip substrate, comprising a cooling roller with a cylindrical surface for cooling and guiding the strip substrate around a partial circumference of the surface encompassing more than 180 DEG and an arrangement of compartments distributed over a partial circumference of the surface encompassing more than 180 DEG each with at least one treatment device arranged therein. The arrangement of compartments is distributed into two partial arrangements separated by a separating plane, the compartments of each partial arrangement being arranged stationary relative to one another and each partial arrangement enclosing a partial circumference of the surface of the cooling roller encompassing no more than 180 DEG. The device is characterized in that both partial arrangements are displaceable away from the cooling roller in a direction perpendicular to the separating plane.

Description

technical field [0001] The invention relates to a multilayer coating device, in particular a multilayer magnetron sputtering coating device, for the surface coating of strip-shaped substrates according to the preamble of claim 1 and to a multilayer coating device according to claim 11 Vacuum coating equipment for strip substrates in the preamble. Background technique [0002] A known vacuum coating system for coating strip-shaped material in a process chamber comprises, in a first evacuatable reel chamber, an unwinding device with an inserted unwinding machine for the strip-shaped material to be coated, The unwinder is arranged in a first roll stand and comprises, in a second evacuatable reel chamber, a take-up device with a detachable winder of the coated material, which is arranged on a second roll seat. Between the reel chambers, the strip material to be coated passes through at least one evacuatable process chamber, wherein a process roll stand with guides for the stri...

Claims

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Application Information

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IPC IPC(8): C23C14/56
CPCC23C14/562C23C14/568
Inventor 约翰内斯·施特罗姆费尔米夏埃尔·亨切尔法尔克·奥托沃尔夫冈·富卡雷克
Owner VON ARDENNE ANLAGENTECHNIK GMBH
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