Micromechanical structure having a deformable membrane and a protection against strong deformations

A technology of micro-machines and diaphragms, applied in the direction of micro-structural devices composed of deformable elements, micro-structural technology, micro-structural devices, etc., can solve problems such as damage, structural cracking, and easily damaged diaphragms

Active Publication Date: 2014-09-03
AUXITROL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] These diaphragms subjected to higher energies become vulnerable, their intrinsic properties are altered and their structure may crack or even break

Method used

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  • Micromechanical structure having a deformable membrane and a protection against strong deformations
  • Micromechanical structure having a deformable membrane and a protection against strong deformations
  • Micromechanical structure having a deformable membrane and a protection against strong deformations

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Embodiment Construction

[0038] The micromechanical mechanism is intended to measure or detect mechanical or dynamic quantities such as pressure, said micromechanical mechanism comprising a deformable diaphragm 20 and a support substrate 10 .

[0039] as in figure 1 , figure 2 and Figure 4 As shown in , the diaphragm is arranged on the support substrate 10 to define a free space 30 . In the case of a micromechanical mechanism for differential pressure measurement, this free space 30 is intended to be filled with a fluid. In this case, the pressure P1 comes from above the structure and the pressure P2 comes from below the structure (see figure 1 , figure 2 and Figure 4 ).

[0040] The diaphragm 20 is intended to support the pressure measuring cells 22, 23a, 23b, 24a, 24b, 25a, 25b, 26a, 26b.

[0041] Free space 30 is typically formed in the initial substrate by micromachining. The micromachining technique used to form such free spaces may be, for example, chemical etching, eg KOH etching at...

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Abstract

The invention relates to a micromechanical structure for measuring or detecting a mechanical quantity or a dynamic quantity, including a deformable membrane (20) and a supporting substrate (10), the membrane (20) including a first portion (20a) and a second portion (20b) surrounded by the first portion (20a), the second portion (20b) having a thickness that is less than the thickness of the first portion (20a), the membrane (20) being suspended above the supporting substrate (10) and thus defining a free space (30), said micromechanical structure comprising in addition a lower abutment (21) for limiting the deformations of the membrane (20), said lower abutment (21) being arranged above the supporting substrate (10) and extending into the free space (30) from said supporting substrate (10) toward the membrane (20), characterized in that the lower abutment (21) comprises islets (101-108) that extend into the free space (30) toward the membrane (20) from a flat surface of the lower abutment (21), the islets (101-108) forming a relief structure in such a manner that, in the case of contact between the islets (101-108) and the fine portion (20b) of the membrane (20), the contact surface between the islets (101-108) and the fine portion (20b) of the membrane (20) is small with respect to the dimensions of the fine portion (20b) of the membrane (20).

Description

technical field [0001] The invention relates to a micromechanical structure intended to measure or detect mechanical or dynamic quantities. [0002] And more particularly, the present invention relates to a micromechanical structure for absolute, relative, or differential pressure measurement of pressure. Background technique [0003] A micromechanical mechanism for measuring a mechanical or dynamic quantity such as pressure, generally comprising a deformable diaphragm suspended above the supporting substrate and defining a free space, and a support substrate. [0004] The use of these suspended membranes is known. [0005] Capacitive sensors or strain gauges supported by the diaphragm are capable of measuring the deformation experienced by the diaphragm subjected to external energy (e.g. pressure applied perpendicular to the main plane of the diaphragm). [0006] The energy applied to the diaphragm or the change of the force applied to the diaphragm can for example be me...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00G01L19/06
CPCG01L9/0047B81B2201/0264B81B3/0097B81B3/0051G01L19/0618G01L9/0042G01L9/0048
Inventor S·布里达
Owner AUXITROL
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