Detaching apparatus
A peeling device, a technology of plate-shaped body, applied in the directions of printing, rotary printing machine, printing machine, etc., can solve the problems of not taking into account, pattern damage and so on
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[0038] figure 1 It is a perspective view showing an embodiment of the peeling device of the present invention. In order to unify the directions in the following figures, figure 1 Set the XYZ orthogonal coordinate axis as shown on the bottom right of the. Here, the XY plane represents the horizontal plane, and the Z axis represents the vertical axis. In more detail, the +Z direction indicates the vertical upward direction.
[0039] This peeling device 1 is a device for peeling two plate-shaped bodies carried in with their main surfaces in close contact with each other. For example, it is used in a part of the pattern formation process of forming a predetermined pattern on the surface of a substrate, such as a glass substrate or a semiconductor substrate. More specifically, in this pattern forming process, a pattern forming material is uniformly applied to the surface of a blanket as a carrier for temporarily supporting the pattern to be transferred (application process), and the...
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