Front filter device of vacuum pump

Abstract

The invention relates to a front filter device of a vacuum pump, and belongs to the field of filter equipment. The device mainly comprises a filter barrel, a filter screen and an actuator, wherein a cavity, an air inlet, an air outlet and a dust collecting area are formed in the filter barrel; the filter screen is around a shaft center and is mounted in the cavity; a rotating shaft which is connected with the filter screen and can be used for rotating the filter screen is mounted on the actuator, and a coupler which is mounted on the filter barrel and is used for sealing the rotating shaft and the actuator is arranged on the rotating shaft. Therefore, the device capable of being used for generating high-concentration particles is used for filtering the high-concentration particles, and the filtered particles are separated from the filter screen by centrifugal force by rotating the filter screen, so that the purposes of cleaning and reusing can be achieved without dismounting the filter screen.

Description

technical field [0001] The invention relates to a filtering device, in particular to a pre-filtering device of a vacuum pump which can clean particles on the filtering net through a rotating filtering net and can be reused without disassembly. Background technique [0002] By the way, most of the industries that produce high-concentration particles in the process are solar energy, semiconductors and some chemical industries, especially single crystal furnaces. Even damage, so the current practice is to install filter equipment to remove the aforementioned particles through filtration, thereby effectively prolonging the service life of the vacuum pump. [0003] However, the current filter equipment must be cleaned after being used for a period of time. No matter whether it is to use air to blow out the filter screen or replace the new filter screen, the filter equipment must still be disassembled during cleaning. , This method is not only labor-intensive and time-consuming d...

AI Technical Summary

Problems solved by technology

[0003] However, the current filter equipment must be cleaned after being used for a period of time. No matter whether it is to use air to blow out the filter screen or replace the new filter screen, the filter equipment must still be disassembled during cleaning. , this method is not only labor-intensive and time-consuming during cleaning, but also the replacement of the filter from time to time will easily lead to increased costs

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