Infrared sensor with acceleration sensor and method for operating an infrared sensor
A technology of acceleration sensor and infrared sensor, which is applied in the field of infrared sensors, can solve the problems of not allowing infrared sensors and infrared sensor arrays, and achieve the effects of saving structural space, simplifying the manufacturing process, and reducing manufacturing costs
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[0026] figure 1 A schematic diagram of a sensor system 10 with a sensor device 1 and an evaluation circuit 4 is shown. The sensor device 1 can have, for example, an infrared sensor 2 or an array of infrared sensors 2 and at least one acceleration sensor 3 . The sensor device 1 can have, for example, a microelectromechanical-based sensor (MEMS sensor) and be designed, for example, in SOI technology (“silicon on insulator”). The number of pixels (Pixel) of infrared sensor 2 or infrared sensor array 2 and the number of acceleration sensors 3 are in figure 1 are shown as examples only and are not restrictive in principle.
[0027] Infrared sensor 2 can be designed, for example, to detect radiation in the far infrared range (FIR, “far infrared”) of an object to be mapped (abzubildenden) and to output infrared image data 4 a. In this case, the infrared sensor 2 or the infrared sensor array 2 can have a main detection direction which is substantially perpendicular to the active su...
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