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Conveyance system

一种输送系统、输送物的技术，应用在输送系统领域，能够解决不容易等问题，达到准确且高效输送的效果

Active Publication Date: 2014-12-24
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, with the increase in size of semiconductor wafers in recent years, FOUP (Front Opening Unified Pod (Front Opening Unified Pod), box) as a container for storing wafers has also increased in size.
Therefore, in semiconductor manufacturing plants, space for storing FOUPs is required more than ever, but it is not easy to secure space for storing FOUPs in a limited space

Method used

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  • Conveyance system
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Examples

Experimental program
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Effect test

Embodiment Construction

[0014] Hereinafter, preferred embodiments will be described in detail with reference to the drawings. It should be noted that in the description of the drawings, the same or corresponding components are assigned the same symbols, and repeated descriptions are omitted.

[0015] figure 1 It is a figure which looked at the conveyance system which concerns on one Embodiment from above. figure 2 yes means figure 1 Perspective view of the delivery system shown. image 3 It is a block diagram showing the system configuration of the transport system.

[0016] Figure 1 ~ Figure 3 The illustrated delivery system 100 is provided in a clean room used in the manufacture of semiconductor devices. The conveyance system 100 includes a storage rack 20 for accommodating objects 10 to be conveyed, a stacking crane 30 , a carrier device (ceiling conveyance vehicle) 40 , and a controller (control unit) 50 . Semiconductor manufacturing apparatuses 60 and 62 are arranged in the clean room. ...

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PUM

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Abstract

A conveyance system (100) is provided with: accommodating shelves (20) which are provided in the vicinity of semiconductor producing devices (60, 62), and which accommodate objects (10) to be conveyed; a stacker crane (30) which carries, on to and off of the accommodating shelves (20), the objects (10) to be conveyed; vehicles (40) for conveying the objects (10) to be conveyed; an ID tag reader (R) which is provided to the stacker crane (30), and which reads ID tags (T) of the objects (10) to be conveyed; and a controller (50) which, in cases when identification information acquired by the ID tag reader (R) is consistent with information included in the conveyance command for the object (10) to be conveyed, controls the stacker crane (30) such that the object (10) to be conveyed is conveyed to a conveyance destination in the conveyance command. At at least one section of the accommodating shelves (20), the objects (10) to be conveyed can be deposited and withdrawn by grippers (44) on the vehicles (40).

Description

technical field [0001] The present invention relates to delivery systems. Background technique [0002] As a conventional conveyance system, the conveyance system described in patent document 1 is known, for example. In the transport system described in Patent Document 1, it is provided with: a transport vehicle that transports boxes with ID tags installed, and an ID reader for identifying the ID tags is mounted on the transport vehicle; The ID label of the box to manage the delivery of the box. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2002-179203 [0004] From the viewpoint of the accuracy and efficiency of conveyance, it is effective to manage cassettes with ID tags like the conveyance system described in Patent Document 1 above. Here, in recent years, in the manufacture of semiconductor devices, the speed of processing has been promoted, and the reduction of tact time in semiconductor manufacturing equipment has been demanded. At the same time, further...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G1/04B65G1/00B65G35/08B65G49/07H01L21/677
CPCB65G1/0421B65G1/04B65G1/137B65G2201/0297G05B19/418G05B2219/45031H01L21/67294H01L21/67769
Inventor 山本真
Owner MURATA MASCH LTD
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