Unlock instant, AI-driven research and patent intelligence for your innovation.

Nitrous oxide renewable room temperature purifier and method

A purifier, room temperature technology, applied in the direction of nitrous oxide, nitrous oxide capture, chemical instruments and methods, etc., can solve the problems of increased cost and complexity of the system

Active Publication Date: 2016-07-06
SAES PURE GAS
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Cooling equipment adds cost and complexity to such systems

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Nitrous oxide renewable room temperature purifier and method
  • Nitrous oxide renewable room temperature purifier and method
  • Nitrous oxide renewable room temperature purifier and method

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0038] Cylindrical scrubber vessels of 4 cc volume with a length of 4.8 cm and a diameter of 1.04 cm were filled with different purification materials and subjected to the activation process according to the protocol in Table 1 indicating the materials and the equilibrium temperature during the activation process. In Table 1, the parameters common to all samples, namely the type of gas flowing during activation (nitrogen), the flow rate (0.5 l / min) and the total length of the activation process (21 hours) have been omitted.

[0039] Table 1

[0040] Sample identification

[0041] Sample 1 was essentially supported by fully oxidized nickel (NiO) due to the exposure of the material to air prior to the activation process. Nickel used for sample S1 has 180m 2 / g surface area.

[0042] All preceding samples have been exposed to 0.1 l / min of N 2 O stream, which contains approximately 50 ppm CO 2 , and the outlet of the purifier was connected to a TraceAnalytical RGA5 g...

example 2

[0048] After the media in the container had exhausted its capacity (analyzer connected downstream reached a reading of 0.5 ppm), the sample S1 made according to the exemplary embodiment was subjected to a reactivation process, i.e. the activation process described in Table 1 was repeated . As a proof that the material is fully reproducible and compatible with the application, after reactivation, the properties of sample S1 were measured to obtain the same values.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
lengthaaaaaaaaaa
Login to View More

Abstract

A nitrous oxide room temperature purification method, apparatus and system utilizing at least partially oxidized nickel. In an embodiment, a room temperature regenerable N2O purifier includes a vessel having an inlet and outlet, an active portion being at least partially filled with a purification material comprising nickel oxide and optional elemental nickel, wherein the weight ratio between the nickel oxide and the optional elemental nickel is equal or higher than 3 and the surface area of the nickel oxide and the optional elemental nickel is equal or higher than 50 m2 / g.

Description

technical field [0001] The invention relates to a purification method at room temperature, and to a reproducible purification system at room temperature for nitrous oxide. Background technique [0002] Nitrous oxide has many industrial uses that require precise control of impurity levels within the gas, the most severe of which are semiconductor manufacturing processes such as chemical vapor deposition, selective oxidation such as in display manufacturing and use in metal oxide semiconductors Rapid Thermal Nitriding Process for Fabrication of (MOS) Capacitors. [0003] In all these applications, such as H 2 O.CO 2 , CO and similar impurities due to degradation and with which N 2 O The properties and properties of devices / components used as process gases interact to have detrimental effects. [0004] Due to CO 2 with N 2 O is close to the condensation temperature value, so the most critical impurity is CO 2 , which is not easily and efficiently removed by means of stan...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C01B21/22F25J3/08
CPCB01D53/02B01D53/0462B01D53/62B01D53/96B01D2253/1124B01D2257/504B01D2257/80C01B21/22C01B2210/0015C01B2210/005C01B2210/0051C01B2210/0062Y02C20/10Y02C20/40Y02P20/151B01D2253/1122
Inventor M·苏西C·兰多尼
Owner SAES PURE GAS