Physical quantity sensor, electronic apparatus, and moving object
A technology of physical quantity sensor and moving body, which is applied in the field of moving body and can solve problems such as damage of moving body
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no. 1 approach
[0064] use Figure 1 to Figure 4 , the physical quantity sensor according to the first embodiment will be described.
[0065] figure 1 is a plan view showing the outline of the physical quantity sensor according to the first embodiment. figure 2 for, modeled figure 1 A cross-sectional view of a section of the physical quantity sensor shown by a line segment A-A' in . image 3 for, modeled figure 1 A cross-sectional view of a section of the physical quantity sensor shown by the line segment B-B' in . Figure 4 It is a schematic diagram for explaining the operation of the physical quantity sensor according to the first embodiment.
[0066] exist Figure 1 to Figure 4 In FIG. 2 , the illustration of the wiring portion connected to each electrode portion and the like is omitted for convenience of description. In addition, in figure 1 The illustration of the cover body is omitted in . Moreover, in Figure 4 In , illustrations other than the movable body and the detection...
no. 2 approach
[0142] use Figure 5 as well as Image 6 , the physical quantity sensor according to the second embodiment will be described.
[0143] Figure 5 is a schematic plan view of the physical quantity sensor according to the second embodiment. Image 6 for, modeled Figure 5 A cross-sectional view of the physical quantity sensor shown by the line segment A1-A1' in .
[0144] exist Figure 5 as well as Image 6 In , an X axis, a Y axis, and a Z axis are shown as three mutually orthogonal axes. In addition, the Z axis is an axis indicating the thickness direction in which the substrate and the cover overlap.
[0145] The physical quantity sensor 1a according to the second embodiment differs from the physical quantity sensor 1 described in the first embodiment in the structure in which the movable body 50 is supported on the substrate 10 and the structure of the stopper 90 . Since other configurations and the like are substantially the same as those of the physical quantity sen...
Embodiment
[0192] refer to Figure 10 to Figure 13 Next, an example to which any one of the physical quantity sensor 1 and the physical quantity sensors 1a to 1d (hereinafter collectively referred to as the physical quantity sensor 1 will be described) according to an embodiment of the present invention will be described.
[0193] Electronic equipment
[0194] reference from Figure 10 to Figure 12 , an electronic device to which the physical quantity sensor 1 according to one embodiment of the present invention is applied will be described.
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