Long-stroke high-precision positioning platform with symmetrically-distributed corrugated sheets
A symmetrical distribution and positioning platform technology, applied in the direction of machine/support, supporting machine, mechanical equipment, etc., can solve the problems of large overall size, insufficient precision, high processing cost, etc., to avoid errors, improve stability, and reduce drift Effect
Inactive Publication Date: 2015-01-28
SOUTH CHINA UNIV OF TECH
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Problems solved by technology
A small number of commercial precision positioning platforms driven by micro-motors, although the range of motion can reach the millimeter level, the accuracy is not high enough, and there are shortcomings that cannot be avoided by traditional machinery
In response to these problems, domestic and foreign scholars have done a lot of research, and have also proposed many design schemes with large strokes and high precision. However, the overall size of these platforms is often too large, and the processing cost is relatively high.
Method used
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[0022] In order to better understand the present invention, the present invention will be further described below in combination with the accompanying drawings, but the protection scope of the present invention is not limited to the scope shown in the embodiments.
[0023] like Figure 1 to Figure 2 As shown, a large-stroke high-precision positioning platform with a symmetrical distribution of corrugated sheets includes a box-shaped terminal platform 7, a box-shaped transition platform 4, and a bracket 1 that are set in sequence from outside to inside with a certain gap. The platform 7, the transition platform 4 and the support 1 are on the same plane, and elastic devices are respectively symmetrically connected between the outer sides of the transition platform 4 and the terminal platform 7 and between the outer sides of the two opposite sides of the support 1 and the transition platform 4, and connected The elastic device between the transition platform 4 and the terminal pl...
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The invention discloses a long-stroke high-precision positioning platform with symmetrically-distributed corrugated sheets. The long-stroke high-precision positioning platform with the symmetrically-distributed corrugated sheets comprises a square terminal platform, a square transition platform and a support which are arranged sequentially at intervals from outside to inside in a sleeving manner, elastic devices are symmetrically connected among the terminal platform and the outer sides of two opposite edges of the transition platform as well as among the transition platform and the outer sides of two opposite edges of the support, and the elastic devices connected between the transition platform and the terminal platform are perpendicular to those connected between the support and the transition platform in space. The long-stroke high-precision positioning platform with the symmetrically-distributed corrugated sheets has the advantages that substantial two-dimensional translational motion output can be obtained when the overall size of the positioning platform is quite small, and the structural size of the corrugated sheets can be changed according to specific work requirements, so that proper motion amplitude and overall rigidity are obtained; overall flexibility of the platform is enhanced greatly, output stability is improved, drifting of the terminal platform during translational motion is reduced, and the positioning platform is simple in structure and convenient to process, not only can be processed and formed integrally, but also can be formed by processing all parts separately and assembling the parts.
Description
technical field [0001] The invention relates to the technical fields of precision positioning and precision machining, in particular to a large-stroke high-precision positioning platform with symmetrically distributed corrugated sheets. Background technique [0002] In the fields of semiconductor lithography, micro-machinery, precision measurement, ultra-precision machining, micro-assembly, biological cell manipulation and nanotechnology, very precise positioning and very fine motion are required, so high-performance precision positioning tables have become technical support. In addition to micro-nano positioning accuracy, excellent stability, stiffness and fast response, the precision positioning platform also requires a large motion stroke. In order to better obtain these outstanding performances, flexible components are often used in the design of precision positioning platforms. Flexible elements can overcome the shortcomings of traditional rigid hinges such as crawlin...
Claims
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IPC IPC(8): F16M11/04
Inventor 王念峰梁晓合张宪民
Owner SOUTH CHINA UNIV OF TECH