A hinge and a chamber using the hinge

Abstract

The present invention provides a hinge, which includes: a hinge base, a hinge shaft, and a hinge arm, and is characterized in that: one end of the hinge arm is connected to the hinge base through the hinge shaft; the hinge also includes a support device, The support device is disposed below one end of the hinge arm connected to the hinge base through the hinge shaft, and the support device includes a support member that can move up and down. Correspondingly, the present invention also provides a chamber using the hinge. The invention can avoid wear of the sealing ring due to excessive extrusion and friction of the top cover against the sealing ring during the closing process of the top cover.

Description

technical field [0001] The invention relates to mechanical structure technology, in particular to a hinge and a chamber using the hinge. Background technique [0002] Vacuum chambers are often used in the field of semiconductor equipment manufacturing, especially chambers involving wafer transfer and process treatment are generally sealed vacuum chambers. In order to be able to perform operations such as picking and placing wafers and maintaining equipment in the chamber, an openable top cover is usually provided on the top of the chamber. The top cover and the chamber are hinged together, and a seal When the top cover is closed, the sealing ring is compressed to ensure the sealing of the chamber. [0003] figure 1 It is a schematic diagram of the existing hinge for opening and closing the chamber roof, figure 1 In this case, the cavity 101 and the top cover 104 are connected by a hinge 103, and the gas spring 102 can provide auxiliary opening force, figure 2 for figur...

AI Technical Summary

Problems solved by technology

like figure 1 As shown, under the effect of the sinking force of f, the top cover will press the hinge shaft 103b down to the bottom of the oblong hole 103a, so that the space between the top cover and the chamber to accommodate the sealing ring is very small, especially when the β angle is very large When the time is small, the part of the sealing ring 105 closest to the hinge will contact the top cover in advance, resulting in excessive extrusion and friction on the sealing ring by the top cover during the subsequent vacuuming process, resulting in wear of the sealing ring

The existing hinge makes the sealing ring wear and tear every time the top cover is opened and closed, shortening the working life of the sealing ring, and the particles produced by the wear will also pollute the cleaning of the vacuum chamber

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