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Method and data analysis system for semi-automated particle analysis using a charged particle beam

A data analysis system and analysis system technology, applied in the field of data analysis system and operation data analysis system, can solve the problems of mutual contact between particles, difficult automatic detection of separate particles, inaccurate particle mineral analysis results, etc.

Active Publication Date: 2015-02-11
CARL ZEISS MICROSCOPY GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, automatic detection of individual particles is difficult because some particles touch or appear to touch each other due to the limited resolution of microscope images
Ignoring these effects leads to inaccurate particle mineral analysis results

Method used

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  • Method and data analysis system for semi-automated particle analysis using a charged particle beam
  • Method and data analysis system for semi-automated particle analysis using a charged particle beam
  • Method and data analysis system for semi-automated particle analysis using a charged particle beam

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Embodiment Construction

[0068] Although the disclosure has been described with respect to certain exemplary embodiments thereof, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art. Accordingly, the exemplary embodiments of the present disclosure set forth herein are intended to be illustrative and not restrictive in any way. Various changes may be made without departing from the spirit and scope of the invention.

[0069] figure 1 A data analysis system 4 for generating analytical data from microscopic data of a charged particle microscope 2 is shown according to an exemplary embodiment. The data analysis system and the charged particle microscope form the analysis system 1 . exist figure 1 In the exemplary embodiment shown, charged particle microscope 2 is a scanning electron microscope. The scanning electron microscope 2 comprises a particle optics system 20 for scanning a focused electron beam 21 across the surface of an object 10 ar...

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Abstract

A data analysis system for generating analysis data depending on microscopic data of an object generated by a charged particle microscope. The microscopic data comprises an image showing a structure. The method comprises displaying a graphical representation of the structure on the display by the graphical user interface. The method further comprises generating separation data representing at least one path of a separation cut, which separates pixels of the structure from each other. The method further comprises visually marking the separation cut by the graphical user interface, depending on the separation data, by differently marking different area portions of the representation, which represent different pixels of the structure which are separated from each other by the separation cut. The method further comprises generating separate analysis data for each of at least two portions of the object, depending on the microscopic data and depending on the separation data.

Description

technical field [0001] The present invention generally relates to data analysis systems and methods for operating data analysis systems configured for automatic or semi-automatic data analysis of microscopic data generated by charged particle microscopes. More specifically, the present invention relates to a data analysis system configured to generate statistical data for a plurality of object particles and a method for operating the data analysis system. Background technique [0002] There are known SEM (Scanning Electron Microscope) systems equipped with EDX (Energy Dispersive X-ray Spectroscopy) systems. A primary electron beam excites the emission of characteristic X-rays from the sample. EDX systems have an energy dispersive spectrometer that detects the quantity and energy of X-rays. This allows for elemental analysis or chemical characterization of the sample. [0003] Such SEM systems are widely used for particle mineral analysis. In typical sample preparation te...

Claims

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Application Information

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IPC IPC(8): G06F17/30
CPCG06T7/0081H01J37/222H01J37/26G01N23/225G06T2207/10061G06T7/0079G06F3/04845G06T2207/20112G06T7/10G06T7/11G06T7/0004G06T2200/24G06T2207/20104H01J37/28H01J2237/225H01J2237/2806H01J2237/2807
Inventor C.格西尔R.莫拉里
Owner CARL ZEISS MICROSCOPY GMBH
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