Spacecraft leakage rate testing system performing parallel air extraction by molecular pumps and cryogenic pump
A testing system and spacecraft technology, applied in the field of vacuum mass spectrometry leak rate testing system, can solve the problems of large volume of leak detection container, high cost, large volume of spacecraft, etc.
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[0014] The following is a specific implementation manner of the content of the present invention, and the content of the present invention will be further clarified through the specific implementation mode below. Of course, the following specific embodiments are described only to illustrate different aspects of the present invention, and should not be construed as limiting the scope of the present invention.
[0015] Such as figure 1 As shown, the spacecraft leak rate testing system adopting molecular pump and cryopump parallel pumping of the present invention includes a leak detection container for accommodating the spacecraft to be checked, a cryopump, a turbomolecular pump, a compound molecular pump, a dry pump and Matching pipeline valves, the leak detection container is provided with a door to facilitate the entry and exit of the spacecraft, and several flange holes are provided to connect with various interfaces of the vacuum system. A cryopump is connected through the ...
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