Sealed leak detection device and leak detection method for tantalum insulators
An insulator and leak detection technology, which is used in measurement devices, fluid tightness testing, and machine/structural component testing. problem, to achieve the effect of real and reliable detection effect, reduce economic burden, and fast response of the instrument
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[0029] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings. The description in this part is only exemplary and explanatory, and should not have any limiting effect on the protection scope of the present invention. .
[0030] Such as Figure 1-Figure 5 As shown, the specific structure of the present invention is: a sealed leak detection device for tantalum insulators, which includes a helium mass spectrometer leak detector 1, a leak detection port 2 is arranged on the top of the helium mass spectrometer leak detector 1, and a connecting port 2 is arranged above the leak detection port 2. 5, and a fluorine rubber sealing ring 3 is set between the connecting piece 5 and the leak detection port 2, a through hole is provided in the middle of the connecting piece 5, an air chamber piece 8 is arranged above the connecting ...
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