Infrared imaging system detector packaging Dewar multi-station leak detection system and method

Abstract

The invention discloses an infrared imaging system detector packaging Dewar multi-station leak detection system and method. According to the invention, the sealing performance of the detector packaging Dewar is accurately checked by using the vacuum standard small leak holes, the detector packaging Dewar with the leak rate range of 10 <-5 >-10 <-12 > Pa.m < 3 > / s can be screened by using a comparison method, and the detector packaging Dewar with the leak rate range of 10 <-13 >-10 <-15 > Pa.m < 3 > / s can be screened by using an accumulation method. And the average leak detection time of the detector packaging Dewar is less than or equal to 30 minutes, the leak detection sensitivity is high, the leak detection range is wide, and the leak detection efficiency is high. According to the invention, multi-station cyclic detection can be realized, and the batch detection efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of tightness testing, in particular to a multi-station ultra-sensitive leak detection system and method applied to a detector package Dewar of an infrared imaging system. Background technique [0002] The sealing performance of the detector package Dewar in the infrared imaging system is one of the important indicators to evaluate the reliability of the infrared imaging system detector. Due to its special function, the leak rate of the detector package Dewar in the infrared imaging system should reach 10 -14 or 10 -15 Pa·m 3 / s, if the sealing is poor, the service life of the infrared imaging system will be shortened, and in severe cases, the function of the infrared imaging system will be completely lost, resulting in the scrapping of the weapons and equipment installed with the infrared imaging system. Therefore, it is necessary to measure the leak rate of the detector package dewar. Perform performanc...

AI Technical Summary

Problems solved by technology

[0003] At present, the helium mass spectrometry leak detection method is usually used, and this kind of leak detection method can only detect the leak rate greater than 10 -12 Pa·m 3 The leak rate of the / s order cannot effectively screen out the detector package Dewar with a smaller leak rate

In addition, this type of leak detection method takes a long time, and there is a problem of low leak detection efficiency for mass production leak detection

[0004] Therefore, the leak rate detection technology of the sealing performance of the existing detector packaging Dewar has the disadvantages of low leak detection sensitivity, narrow leak detection range, high possibility of misjudgment of leak rate, and low leak detection efficiency.

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