Unlock instant, AI-driven research and patent intelligence for your innovation.

Protection device and method for sheet conveying manipulator for furnace tubes

A technology for protection devices and manipulators, applied to manipulators, manufacturing tools, etc., can solve problems such as damage to grippers and protective covers, and achieve the effect of ensuring safety

Active Publication Date: 2015-03-25
SHANGHAI HUALI MICROELECTRONICS CORP
View PDF7 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At this time, since the film transfer manipulator cannot detect the existence of the protective cover, the gripper will not stop moving, which will also cause collisions between the gripper and the protective cover and cause damage accidents.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Protection device and method for sheet conveying manipulator for furnace tubes
  • Protection device and method for sheet conveying manipulator for furnace tubes
  • Protection device and method for sheet conveying manipulator for furnace tubes

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0032] The specific embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0033] It should be noted that, in the following specific embodiments, when describing the embodiments of the present invention in detail, in order to clearly show the structure of the present invention for the convenience of description, the structures in the drawings are not drawn according to the general scale, and are drawn Partial magnification, deformation and simplification are included, therefore, it should be avoided to be interpreted as a limitation of the present invention.

[0034] The wafer transfer manipulator used for the furnace tube is set at the bottom area of ​​the furnace tube, mainly used to take out the silicon wafers in the wafer box and transfer them to the wafer boat, and the wafer boat will then send the silicon wafers into the furnace tube for processing; after the process The wafer boat exits the furnace ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a protection device and method for a sheet conveying manipulator for furnace tubes. The manipulator is provided with a protection cover detection unit so that the state whether a grasp of the manipulator is covered with the protection cover or not can be detected in real time. A control unit forbids a drive unit of the manipulator from driving the manipulator when the grasp is covered with the protection cover, so that the sheet conveying manipulator is prevented from moving when the grasp is covered with the protection cover. Meanwhile, the alarm function is achieved, so that the accident that when moving by mistake, the grasp impacts the protection cover and is damaged, and operation safety is ensured when the manipulator is maintained.

Description

technical field [0001] The invention relates to the technical field of semiconductor integrated circuit manufacturing, and more specifically, to a protection device and a protection method for a manipulator for transferring a film for a furnace tube. Background technique [0002] Furnace tube technology has been widely used in the semiconductor integrated circuit industry. According to different operating pressures, it can be divided into atmospheric pressure furnace tubes and low pressure furnace tubes. Atmospheric pressure furnace tubes are mainly used for thermal oxidation, diffusion annealing and other processes; low pressure furnace tubes are mainly used for LPCVD processes. The furnace tube is usually divided into vertical type and horizontal type. Among them, the vertical type furnace tube has the advantages of small footprint, high degree of automation, large single loading capacity, improved operator safety and less particle pollution. Because of its better tempera...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): B25J19/00
Inventor 王志良裴雷洪俞玮敖海林
Owner SHANGHAI HUALI MICROELECTRONICS CORP