Wafer lens array mold with moth-eye random array nano-depression structure and preparation method thereof

Abstract

The invention relates to a wafer lens array mold with moth eye imitative random array nanometer sunken structures and a preparation method of the wafer lens array mold. The wafer lens array mold is made of a silicon material or a germanium material, and micro-lens sunken curved surface section molds are evenly distributed on the surface of the mold and form an array; the moth eye imitative random array nanometer sunken structure is distributed on the surface of each sunken curved surface section mold, the sizes and the adjacent intervals of the nanometer sunken structures are distributed at random, the bottom diameter of the nanometer sunken structures ranges from 10 nm to 100 nm, the top diameter of the nanometer sunken structures ranges from 50 nm to 300 nm, the center interval of every two adjacent nanometer sunken structures ranges from 100 nm to 500 nm, and the height of the nanometer sunken structures ranges from 100 nm to 1500 nm; a two-dimensional random array moth eye imitative nanometer convex structure is arranged on the surface of each polymer material wafer micro-lens prepared through the wafer lens array molds in batches, the broadband spectrum anti-reflection effect of visible light wavebands can be achieved without plating anti-reflection films, and the technological process is greatly simplified.

Description

technical field [0001] The invention relates to a mold for processing a wafer lens array sheet, in particular to a wafer lens array mold with a moth-eye random array nano-depression structure and a preparation method thereof. Background technique [0002] Wafer optical lens array refers to processing a certain number of optical microlenses on a flat wafer substrate according to a specific array arrangement. The lens material can be optical grade polymer material or optical glass material. [0003] Recently, major mobile phone manufacturers regard wafer optical camera (Wafer Level Camera, WLC) as the most promising technology for next-generation low-cost mobile phone camera manufacturing. Wafer optical camera means that the lens assembly is manufactured on a 2-inch-8-inch optical wafer, and then the optical wafer and the CMOS image sensor wafer are stacked together, and finally the stacked wafer is cut into thousands of micro Camera module. Almost all major camera vendors a...

AI Technical Summary

Problems solved by technology

In some applications, the aluminum material as the base material of the mold has the problem of insufficient mechanical properties and matching of the expansion coefficient

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