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Laser heat treatment equipment

A technology of laser heat treatment and equipment, applied in laser welding equipment, welding equipment, metal processing equipment and other directions, can solve problems such as mask misalignment

Inactive Publication Date: 2019-04-09
AP SYST INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this condition, the mask is misaligned because the high-temperature heat emitted from the scattered part of the laser beam deforms the mask support module
Therefore, the mask should be realigned, which is a troublesome process

Method used

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  • Laser heat treatment equipment
  • Laser heat treatment equipment
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Embodiment Construction

[0022] Hereinafter, specific embodiments will be described in detail with reference to the accompanying drawings. This invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like reference numerals refer to like components throughout.

[0023] figure 1 A cross-sectional view for explaining a main part of a laser heat treatment apparatus according to an exemplary embodiment. figure 2 To illustrate a plan view of a mask supporting module according to the current embodiment. image 3 A view for explaining a mask supporting module, a beam cutter installed on the mask supporting module, and a heat shielding member according to the current embodiment. FIG. 4( a ) is a cross-sectional view illustrating a beam cutter according to the pr...

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Abstract

The invention provides laser heat treatment equipment. The laser heat treatment equipment comprises a mask support module configured to support a mask and a beam cutter arranged between the mask support module and an image forming system and corresponding to an area of a laser beam reflected from the image forming system and scattered to the mask support module so that the laser beam reflected and scattered from the image forming system is prevented from being irradiated to the mask support module. Therefore, the laser beam reflected and scattered from the image forming system is prevented from being irradiated to the mask support module by the beam cutter. Besides, a heat shield part is arranged between the mask support module and the beam cutter so that the beam cutter is prevented from being directly connected to the mask support module, and heat is prevented from being transferred from the beam cutter to the mask support module.

Description

technical field [0001] The present invention relates to a heat treatment apparatus, and more particularly, to a laser heat treatment apparatus for preventing a mask support module from being damaged by laser heat. Background technique [0002] A typical heat treatment apparatus for processing a substrate by using a laser comprises: a chamber having a transmission window in its upper portion; a substrate stage disposed in the chamber to support and move the substrate horizontally; a mask support module outside to support the mask; an oscillating part installed outside the chamber to provide the laser light; and an image formation of the focused laser light disposed between the mask support module and the chamber and corresponding to the upper side of the transmission window system (image forming system) (or projection lens). Thus, laser light is emitted from the oscillating portion to the substrate placed in the chamber through the mask and image forming system. [0003] Al...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/324
CPCH01L21/268H01L21/324H01L21/67098B23K26/064B23K26/083B23K26/50B23K26/702
Inventor 梁相熙沈亨基金锺明
Owner AP SYST INC