A pressurized jet deposition device and method for organic vapor materials
An organic vapor, organic material technology, applied in the direction of spraying device, liquid spraying device, device for coating liquid on the surface, etc., can solve the problems of low deposition rate, material waste, low resolution of organic film, etc., to avoid waste. Effect
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Embodiment 1
[0036] Such as image 3 As shown, the pressurized injection deposition device for organic vapor materials provided by the present invention includes a mixing uniform pressure chamber 9, an organic material vapor source 8, a high-pressure carrier gas supply device 10, a piezoelectric booster device 12 and a nozzle 13, and the organic material vapor The source 8 and the high-pressure carrier gas supply device 10 are both connected to the mixing and uniform pressure chamber 9 , and the bottom of the mixing and uniform pressure chamber 9 is connected to the nozzle 13 through the piezoelectric booster 12 . Among them, the mixing and uniform pressure chamber 9 is a thermal chamber, which has a certain heat preservation performance; organic materials can be selected from different polymer materials or small molecule organic materials according to processing requirements; the high-pressure carrier gas supply device 10 generally adopts an air pump, and the carrier gas is usually Nitrog...
Embodiment 2
[0047] like Figure 4 As shown, on the basis of Embodiment 1, Embodiment 2 of the present invention is also provided with a deposition substrate 5 and a cooling system. A plurality of nozzles 13 form a nozzle group, and the deposition substrate 5 is arranged below the nozzle group. The carrier gas mixture is quickly sprayed on the deposition substrate 5 to form a satisfactory organic film pattern, and the deposition substrate 5 does not need to be covered by a mask, thus avoiding the waste caused by spraying organic materials on the mask. Of course, the organic material vapor sprayed from the nozzle 13 can also be directly sprayed on other deposition substrates.
[0048] The deposition substrate 5 can be installed on a translation substrate stage, and the translation substrate stage can translate the deposition substrate 5 relative to the nozzle 13 .
[0049] Further, the cooling system is arranged under the deposition substrate 5, specifically, it can be arranged in the tran...
Embodiment 3
[0053] The pressurized jet deposition method of the organic vapor material provided in another aspect of the present invention comprises the following steps:
[0054] S1. Heating the organic material to generate organic material vapor, and passing the organic vapor into the mixing and uniform pressure chamber 9;
[0055] S2. Passing carrier gas into the mixing uniform pressure chamber 9 to form a carrier gas mixture with the organic vapor;
[0056] S3. In the mixing and uniform pressure chamber 9, the temperature of the carrier gas mixture is adjusted through the temperature control element 11;
[0057] S4. The uniformly mixed carrier gas is sprayed out of the nozzle 13 through the piezoelectric booster 12 and sprayed toward the deposition substrate 5 .
[0058] The above-mentioned organic material steam can include multiple types, and some types of organic materials can be mixed with other types of organic materials and then passed into the mixing and uniform pressure chambe...
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