Manufacture method of storage device
A manufacturing method and memory technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of compression of the landing area of the contact plug, exposure of metal silicide, and inability to etch, and achieve good element characteristics.
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[0028] The fabrication and use of the embodiments of the present invention are described below. Embodiments of the invention provide many suitable inventive concepts that can be broadly embodied in a wide variety of specific contexts. The specific embodiments disclosed are merely illustrative of specific ways to make and use the invention, and are not intended to limit the scope of the invention.
[0029] It is to be appreciated that the following disclosure of this specification provides many different embodiments or examples for implementing different features of the present invention. However, the following disclosure of the present specification is a specific example describing each component and its arrangement, in order to simplify the description of the invention. Of course, these specific examples are not intended to limit the present invention. For example, if the following disclosure in this specification describes that a first feature is formed on or over a second...
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