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Differential pressure sensor and method for the production thereof

A sensor and differential pressure technology, applied in the field of differential pressure sensor and its manufacturing, can solve complex problems

Active Publication Date: 2015-06-10
ENDRESS HAUSER INC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the preparation of membrane beds or their integration into pressure sensors is complicated

Method used

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  • Differential pressure sensor and method for the production thereof
  • Differential pressure sensor and method for the production thereof
  • Differential pressure sensor and method for the production thereof

Examples

Experimental program
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Embodiment Construction

[0040] figure 1 The differential pressure sensor 1 shown in includes a silicon measuring membrane 10 which is arranged between two platforms 20 and is in pressure-tight connection with them along an annular edge region 11 which The deflectable area 12 surrounds the shape of a disc. The measuring membrane has a thickness of several tens of μm, for example about 40 μm, wherein the thickness of the measuring membrane is selected relative to the radius of the deflectable region as a function of the required measuring range. In this example of embodiment, the radius of the deflectable region 12 of the measuring membrane is eg 1100 μm.

[0041] The two platforms 20 preferably have a micromechanically substantially symmetrical configuration with respect to the center plane of the measuring membrane, so that the following description of the structure of one platform 20 also applies to the other platform 20 . The platform 20 has a layered structure, the layer order of which will now be...

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Abstract

The invention relates to a differential pressure sensor (1) comprising a measurement membrane (10), which is arranged between two counter bodies (20) and is connected pressure-tight to each of the counter bodies (20) by means of a respective first insulating layer (26) so as to form a pressure chamber between the counter bodies and the measurement membrane. The insulating layer comprises silicon oxide in particular. The differential pressure sensor also has an electrical transducer for measuring a pressure-dependent deflection of the measurement membrane. The counter bodies (20) have support points (27), which the measurement membrane (10) at least partially contacts in the event of an overload. The support points (10) have position-dependent heights h. The differential pressure sensor is characterized in that the support points (27) are formed by isotropic etching in the first insulating layer (26), and the respective height h of each support point is a function of an extension of a base of the support point in the reference plane.

Description

technical field [0001] The invention relates to a differential pressure sensor and a manufacturing method thereof. Background technique [0002] Differential pressure sensors measure, depending on their purpose, the differential pressure between a first medium pressure and a second medium pressure, wherein the range of the differential pressure to be measured is significantly smaller than the first or second medium pressure. This leads to conflicting objectives in the design of the differential pressure sensor, on the one hand, it should be able to measure small differential pressures, while on the other hand it must be resistant to high medium pressures, where, especially in the case of incorrect operation, the differential pressure does It can reach the magnitude of medium pressure. Without protective measures, the measuring membrane of the differential pressure sensor would be destroyed by such a high differential pressure. [0003] Known as protective measures are, for...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L19/06G01L9/00B81C1/00G01L13/02H01L29/84
CPCG01L9/0073G01L13/025G01L19/0618B81B3/0027B81B2201/0264B81B2203/0127B81C1/00158B81C1/00396B81C1/00531G01L9/0072
Inventor 伊戈尔·格特曼托马斯·林克彼得·诺门森拉斐尔·泰伊朋
Owner ENDRESS HAUSER INC
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