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Rotating motor operation control method and device

A technology for rotating electrical machines and operation control, which is applied to the starter, motor generator/starter, etc. of a single polyphase induction motor, and can solve the problem that the rotating electrical machine cannot be reversed.

Active Publication Date: 2015-07-01
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the embodiments of the present invention is to provide a method for controlling the operation of a rotating electrical machine to solve the problem that the rotating electrical machine cannot be reversed

Method used

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  • Rotating motor operation control method and device
  • Rotating motor operation control method and device
  • Rotating motor operation control method and device

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Embodiment Construction

[0088] In order to make the above objects, features and advantages of the embodiments of the present invention more comprehensible, the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0089] refer to figure 2 , shows a flow chart of the steps of an embodiment of a method for controlling a gas passage in an embodiment of the present invention, the rotating motor drives the rotating tray to rotate, and materials are placed on the tray, such as figure 2 As shown, the method includes the following steps:

[0090] Step 201, calculating the compensation pulse when the rotating electrical machine rotates;

[0091] refer to Figure 3a , shows a schematic diagram of gear meshing of a rotating electrical machine according to the present invention. Such as Figure 3a As shown, there will be a displacement difference in gear meshing, which is the gear meshing gap. Whe...

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Abstract

The embodiment of the invention provides a rotating motor operation control method and device. A rotating motor drives a rotating tray to rotate, and materials are arranged on the rotating tray. The method comprises calculating the compensation pulse of the rotating motor during rotation; calculating the numbers of forward space and reverse space when the materials move from the current position in the rotating tray to a target position; according to the compensation pulse, the number of forward space, the number of reverse space and the direction of last rotation of the rotating motor, determining pulses required for driving the materials to move from the current position to the target position; driving the rotating motor to rotate through the pulses to move the materials from the current position to the target position. By adding the compensation pulse, the rotating motor operation control method overcomes influence of gear clearance, achieves reverse rotation, improve the efficiency of material conveying and further improve the production efficiency.

Description

technical field [0001] The invention relates to the control field of semiconductor equipment, in particular to an operation control method of a rotating electric machine and an operation control device of the electric rotating machine. Background technique [0002] Many semiconductor devices use rotating motors to drive rotating trays for material transfer, such as APCVD (Atmospheric Pressure Chemical Vapor Deposition, Atmospheric Pressure Chemical Vapor Deposition) equipment. [0003] However, the rotating motor can only rotate in the forward direction, and its pulse count continues to accumulate. In order to avoid data overflow, it needs to be manually cleared every time the process is executed, which is cumbersome to operate. [0004] In particular, under certain process requirements, such as figure 1 In the pallet of the APCVD equipment shown, in the current process chamber, the No. 3 material has just completed the process, and the No. 4 material is scheduled to be the...

Claims

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Application Information

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IPC IPC(8): H02P1/40
Inventor 张京华
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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