A Traceable Method for Calibrating the Elastic Constant of a Microcantilever on an Atomic Force Microscope

Abstract

The invention provides a traceability method for thermal noise calibration method of elastic constant of atomic force microscope micro-cantilever. Interval division of beam elastic constant range, micro-cantilever physical benchmark, traceability experimental method, calculation formula of traceability correction factor, and calculation formula of thermal noise method for calibrating any micro-cantilever elastic constant on atomic force microscope. The effect of the present invention is to realize the traceability between the value of the thermal noise method and the international unit SI for calibrating the elastic constant of the micro-cantilever on the atomic force microscope, and ensure the calibration of the elastic constant of the micro-cantilever on the atomic force microscope and the accuracy of force value measurement, Thus, different laboratories use the atomic force microscope to perform data uniformity, reliability and comparability when calibrating micro-cantilever beam elastic constants, micro-force measurement or micro-force loading experiments.

Description

technical field [0001] The invention belongs to the intersection field of nanotechnology and metrology, and relates to a traceability method for calibrating the elastic constant of a micro-cantilever beam on an atomic force microscope. Background technique [0002] The micro-cantilever is the core component of the atomic force microscope (AFM: Atomic Force Microscope). The AFM realizes the imaging of the sample, the measurement of the force and the loading of the force through the micro-cantilever. A micro-cantilever is an elastic element with length, width and thickness in the range of several nanometers (nano-meter) to hundreds of micrometers (micro-meter). When in use, one end is fixed and the other end is free. The micro-cantilever beam is an elastic element that follows Hooke's law when measuring or loading a small force. According to Hooke's law, F=kΔz, among them, F is a small force, the international unit is Newton (symbol N), k is the elastic constant of the micro-...

AI Technical Summary

Problems solved by technology

The thermal noise calibration method of the elastic constant of the micro-cantilever beam is a commonly used elastic constant calibration method on the atomic force microscope, but because there is no recognized traceability method at home and abroad, there are large differences in the force value measurement data of different laboratories, which are not comparable. There are often great differences in the interpretation of the force value itself and the nature of the phenomenon.

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