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Vibration-controlled substrate handling robot, systems, and methods

A vibration control and manipulator technology, applied in the direction of program control manipulators, manipulators, conveyor objects, etc., can solve the problems of polluting the manufacturing environment and negative effects of substrates

Active Publication Date: 2015-07-29
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Particle generation is generally a disadvantage as it can contaminate the manufacturing environment and potentially negatively impact the manufactured substrates

Method used

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  • Vibration-controlled substrate handling robot, systems, and methods
  • Vibration-controlled substrate handling robot, systems, and methods
  • Vibration-controlled substrate handling robot, systems, and methods

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Embodiment Construction

[0017] Electronic device manufacturing can involve very precise and rapid transport of substrates between multiple locations. In particular, such manipulators need to be able to be precisely oriented relative to the chamber (eg, a process chamber or one or more load lock chambers) that the manipulator serves. One or more end effectors (sometimes referred to as "blades") may be attached at the end of the arm of the robot and may be adapted to transport one or more substrates placed on the end effectors to and from The process chamber and / or one or more load lock chambers of the substrate processing system are transported out. The substrate needs to be moved as fast as possible, but with minimal slippage and particle generation.

[0018] In some cases, however, sliding of the substrate may occur on the end effector, in particular on the end effector pads of the end effector. Such substrate slippage can be induced by horizontal (eg lateral) acceleration of the substrate combine...

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PUM

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Abstract

Embodiments disclose a vibration-controlled robot apparatus. The apparatus includes a robot having an end effector operable to transport a substrate, a sensor coupled to the robot, the sensor operable to sense vibration as the robot transports the substrate, and operating the robot to reduce vibration of the end effector supporting the substrate. In some embodiments, a filter is provided in the motor drive circuit to filter one or more frequencies causing unwanted vibration of the end effector. Vibration control systems and methods of operating the same are provided, as are other aspects.

Description

[0001] Related applications [0002] This application claims that the application was filed on November 30, 2012, and the name is "VIBRATION-CONTROLLED SUBSTRATE HANDLING ROBOT, SYSTEMS, AND METHODS (vibration-controlled substrate transfer manipulator, system and method)" (the agent's case number is 17490USA / L / Priority to US Provisional Patent Application No. 61 / 731,816 of FEG / SYNX / CROCKER S) is hereby incorporated by reference in its entirety for all purposes. technical field [0003] The present invention relates generally to substrate transfer systems, and more particularly, to substrate transfer robots and methods of operating the substrate transfer robots. Background technique [0004] Conventional electronic device manufacturing systems may include multiple processing chambers and one or more load lock chambers. These chambers may be included in a cluster tool in which a plurality of processing chambers may be distributed around a transfer chamber, for example. Thes...

Claims

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Application Information

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IPC IPC(8): H01L21/677B65G49/06B25J9/16B25J19/02
CPCB25J9/1653
Inventor 尼尔·玛利杰弗里·C·赫金斯亚历克斯·明科维奇布伦丹·蒂尔
Owner APPLIED MATERIALS INC