Array substrate structure and production method thereof

Abstract

The invention provides an array substrate structure and a production method thereof. According to the production method of the array substrate structure, after a common electrode (91) is formed, an anti-reduction layer (82) is formed on the common electrode (91) before a second insulating layer (83) is deposited, and therefore, a situation in which an reducing atmosphere generated in a process in which the second insulating layer (83) is directly deposited on the common electrode (91) changes the quality of the film layer of the common electrode (91) can be avoided, and influence of the deposition of the second insulating layer (83) on the common electrode (91), on the transmittance of the common electrode (91), can be decreased, and high transmittance of the common electrode (91) can be ensured, and a display effect can be improved.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an array substrate structure and a manufacturing method thereof. Background technique [0002] The touch screen monitor (Touch Screen) allows the user to operate the host computer as long as the icon or text on the computer display screen is lightly touched with a finger, thus getting rid of the keyboard and mouse operation and making the human-computer interaction more straightforward. It is mainly used for information inquiry in public halls, leadership offices, electronic games, ordering songs and dishes, multimedia teaching, air tickets, train ticket pre-sales, etc. The products are mainly divided into three categories: capacitive touch screen, resistive touch screen and surface acoustic wave touch screen. [0003] The array substrate is an important part of the touch display panel. [0004] see figure 1 , is a schematic cross-sectional view of an existing array s...

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Problems solved by technology

[0010] i.e. the SiH 4 , NH 3 , and N 2 React to form SiN under the action of electromagnetic field generated by RF power (radio frequency power) x :H and H 2 , the H produced by the reaction 2 The atmosphere is reducing, and it is easy to reduce the surface area of ​​the common electrode 910, such as figure 2 As shown, a reduced ITO layer 912 is formed on the surface of the common electrode 910. Below the reduced ITO layer 912 is an ITO layer 914. Due to the poor light transmittance of the reduced ITO layer 912, the overall common electrode 910 The light transmittance is greatly reduced, which in turn reduces the overall light transmittance of the touch display panel, which affects the display effect of the panel (such as brightness, etc.)

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