Magnetic sensing device and preparation process thereof

A preparation process and magnetic sensing technology, which is applied in the direction of the size/direction of the magnetic field, can solve the problems of sensitivity and precision to be further improved, poor sensing performance of the device, etc., and achieve the effect of improving the sensing ability and sensitivity, and increasing the sensing ability

Active Publication Date: 2015-09-02
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] However, usually the magnetic conduction unit in the trench only includes a layer of magnetic structure, whi

Method used

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  • Magnetic sensing device and preparation process thereof
  • Magnetic sensing device and preparation process thereof
  • Magnetic sensing device and preparation process thereof

Examples

Experimental program
Comparison scheme
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Example Embodiment

[0067] Example one

[0068] See Figure 8 The present invention discloses a magnetic sensor device, the device includes a third-direction magnetic sensor component (Z-axis sensor), and the third-direction magnetic sensor component includes: a substrate 1, a magnetic conductive unit, and an induction unit. A groove 2 is opened on the surface of the substrate 1, and the main part of the magnetic conductive unit is arranged in the groove 2.

[0069] Specifically, the magnetic permeable unit includes a first magnetic permeable subunit 41 and a second magnetic permeable subunit 42. The main body of the first magnetic permeable subunit 41 is arranged in the groove 2 and partially exposed from the groove 2 to The surface of the substrate 1; the main part of the second magnetic permeable subunit 42 is arranged in the groove 2, and a first dielectric material is provided between the second permeable subunit 42 and the first permeable subunit 41. The magnetic permeable unit is used to sens...

Example Embodiment

[0091] Example two

[0092] The difference between this embodiment and the first embodiment is that, in this embodiment, the magnetic permeable unit includes a number of permeable subunits (such as three or more), and the first and second permeable subunits serve as Two of the magnetic sub-units. The main part of each magnetic permeable subunit is arranged in the groove, and the angle between the main part of the permeable subunit and the plane of the base is 45°-90°; the magnetic subunits are separated by a dielectric material.

[0093] The number of sensing subunits in the sensing unit is the same as the number of magnetic permeable subunits. Each permeable subunit senses the magnetic signal in the third direction, and outputs the magnetic signal to the corresponding inductive subunit for measurement; each inductive subunit measures the magnetic field in the first direction or / and the second direction, combined with the corresponding permeable subunit The magnetic signal output...

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Abstract

The invention discloses a magnetic sensing device and a preparation process thereof. The magnetic sensing device comprises a third-direction magnetic sensing component. The third-direction magnetic sensing component comprises a substrate, a magnetic guiding unit and a sensing unit. The surface of the substrate is provided with a groove. The magnetic guiding unit comprises at least two magnetic guiding sub-units. The magnetic guiding unit is partially arranged in the groove, and is partially exposed from the groove. A medium material is arranged between the two adjacent magnetic guiding sub-units. The magnetic guiding unit is used for sensing a magnetic signal in a third direction, and outputs the magnetic signal to the induction unit for measurement. The sensing unit is arranged on the substrate surface and is used for measuring the magnetic field in a first direction or/and a second direction. Through a magnetic signal which is output from the magnetic conducting unit, the sensing unit can measure a third-direction magnetic field which is guided to the first direction or/and the second direction by the magnetic guiding unit. According to the magnetic sensing device and the preparation process thereof, through increasing the number of magnetic material layers of a Z-axis magnetic guiding unit, Z-axis sensing capability is improved. Furthermore the sensing capability and sensitivity of the magnetic sensing device are improved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor devices and processes, and relates to a magnetic sensing device, in particular to a preparation process of the magnetic sensing device. Background technique [0002] According to its principle, magnetic sensors can be divided into the following categories: Hall elements, magneto-sensitive diodes, anisotropic magnetoresistance elements (AMR), tunnel junction magnetoresistance (TMR) elements and giant magnetoresistance (GMR) elements, induction coils , superconducting quantum interference magnetometer, etc. [0003] Electronic compass is one of the important application fields of magnetic sensors. With the rapid development of consumer electronics in recent years, in addition to navigation systems, more and more smart phones and tablet computers have also begun to be equipped with electronic compass as standard, bringing users In recent years, the demand for magnetic sensors has also begun to...

Claims

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Application Information

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IPC IPC(8): G01R33/02
Inventor 杨鹤俊张挺
Owner QST CORP
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