The invention provides a preparation method of a silica-based surface carboxylated graphene oxide self-assembled composite film. The method comprises the following steps: 1, after a silicon wafer subjected to processing is cleaned and dried, putting the silicon wafer into a Piranha solution to soak; 2, taking out the silicon wafer in the Piranha solution, cleaning and drying the silicon wafer, adding the silicon wafer into a silane solution to carry out self-assembling reaction, thereby obtaining a product A; 3, taking out the product A, cleaning and drying the product A, thereby obtaining a silicon wafer with a silica-based surface on which an aminosilane film is arranged; 4, putting the product obtained in the step 3 into a graphene oxide solution subjected to carboxylation so as to carry out reaction, thereby obtaining a product B; and 5, taking out the product B, carrying out cleaning, drying and carrying out heat preservation on the product B so as to obtain a final product silica-based surface carboxylated graphene oxide self-assembled composite film. The friction coefficient of a product prepared by using the method disclosed by the invention is 0.18-0.22, and the wear life is greater than 2400 seconds; and the preparation method disclosed by the invention is simple in process and low in cost, and provides convenience for the surface treatment of silica-based parts in micro electro mechanical systems.