The invention relates to a 
nanocrystal nonvolatile memory based on 
strained silicon in the technical fields of nano electronic components and nano 
processing. The 
nanocrystal nonvolatile memory based on 
strained silicon comprises a 
silicon substrate, a GeSi gradually-doped buffer layer, a Gel-xSix relieving layer, a 
strained silicon layer, lightly-doped drain electrodes, a source conduction region, a drain conduction region, a tunneling 
dielectric layer, a 
nanocrystal charge storage layer, a 
control grid dielectric layer and a grid 
electrode material layer, wherein the GeSi gradually-doped buffer layer, the Gel-xSix relieving layer and the strained 
silicon layer are deposited on the 
silicon substrate; the lightly-doped drain electrodes, the source conduction region and the drain conduction region are arranged at two sides in the silicon substrate; the tunneling 
dielectric layer covers a current carrier channel arranged between the source conduction region and the drain conduction region; the nanocrystal charge storage layer covers the tunneling 
dielectric layer; the 
control grid dielectric layer covers the tunneling 
dielectric layer; and the grid 
electrode material layer covers the 
control grid dielectric layer. According to the invention, the mobility is increased by utilizing the strained silicon, thereby increasing the reading current, and simplifying a 
peripheral circuit; the nanocrystal nonvolatile memory based on strained silicon adopts the nanocrystal as a floating grid material, so that the performance of a storage device is improved, and particularly, the storage performance, such as storage windows, 
programming / erasing speed, 
data retention characteristic and the like, is improved comprehensively.