Nonaqueous non-abrasive polishing solution for soft, crisp and deliquescent crystal
A non-abrasive polishing liquid and deliquescent technology, which is applied in the direction of polishing composition, chemical instruments and methods, can solve the problems of inability to obtain ultra-smooth and high-integrity surfaces, unfavorable material removal rate, abrasive embedding, etc., to achieve non-volatile, Long service life and good stability
Active Publication Date: 2009-07-15
DALIAN UNIV OF TECH
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Abstract
The invention discloses a nonwater-based grinding-medium-free chemical mechanical polishing solution adapted to polishing crispy and easily deliquescent crystal. The components of the polishing solution are as below in terms of weight percentage: 40-65% of oil phase, 10-22% of deionized water, and the balance of surface active agent. The oil phase is alcohol or ester, and the surface active agent can adopt high-carbon fatty alcohol polyethenoxy ether, polyoxyethylene nonyl phenyl ether, polyoxyethylene octyl phenyl ether or polyoxyethylate amide of a non-ionic surface active agent. The invention has the advantages of simple polishing solution preparing method, good fluidity, no toxicity, no pollution, no corrosion, good stability, no easy volatilization and long service life. The surface of a polished sample has a roughness concentration which can be up to 1.7 nm, is free from such defects as scratch, damage, and the like, and can be permanently stored at the room temperature in the airtight condition.
Application Domain
Polishing compositions
Technology Topic
IonChemistry +15
Examples
- Experimental program(3)
Example Embodiment
Example Embodiment
Example Embodiment
PUM
Property | Measurement | Unit |
Removal rate | 458.7 | |
Removal rate | 823.7 | |
Removal rate | 1831.2 |
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