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75results about How to "Increase read current" patented technology

Flash memory unit for shared source line and forming method thereof

The embodiment of the invention provides a flash memory unit for a shared source line and a forming method thereof. The provided flash memory unit for the shared source line comprises a semiconductor substrate, a source line, a floating gate dielectric layer, a floating gate, a control gate dielectric layer, a control gate, side wall dielectric layers, side walls, a tunneling oxide layer, a word line, a drain electrode and a source electrode, wherein the source line is positioned on the surface of the semiconductor substrate; the floating gate dielectric layer, the floating gate, the control gate dielectric layer and the control gate are sequentially positioned on the surface of the semiconductor substrate on two sides of the source line; the side wall dielectric layers are positioned between the source line and the floating gate as well we between the source line and the control gate; the side walls are positioned on the floating gate and the control gate, which are far from the source line; the tunneling oxide layer is adjacent to the side wall and is positioned on the surface of the semiconductor substrate; the word line is positioned on the surface of the tunneling oxide layer; the drain electrode is positioned in the semiconductor substrate at one side of the word line, which is far from the source line; the source electrode is positioned in the semiconductor substrate which is right opposite to the source line; and the floating gate is provided with a p-type doping end which is close to the source line, wherein the doping type of the floating gate is in a p type and the doping type of other parts is respectively in an n type.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Three-dimensional semiconductor device and manufacturing method thereof

The invention discloses a three-dimensional semiconductor device which comprises a plurality of storage units and a plurality of selection transistors. Each of the plurality of storage units comprises a channel layer which is distributed along a direction perpendicular to the surface of a substrate; a plurality of interlayer insulating layers and a plurality of grid stack structures which are alternately stacked along the side wall of the channel layer; a plurality of floating gates which are arranged between the plurality of interlayer insulating layers and the side wall of the channel layer; a drain electrode which is arranged at the top of the channel layer; and a source electrode which is positioned in the substrate between two adjacent storage units of the plurality of storage units. According to the three-dimensional semiconductor device and a manufacturing method thereof, the floating gates are arranged at the side walls of the vertical channels, and the starting of the source and drain regions generated on the side walls of the channels due to induction is controlled through the coupling between the gate electrodes and the floating gates, thereby improving induction efficiency and intensity of the source and drain regions, reducing source and drain resistance of the storage units, and improving read current and read speed of a storage array.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Nanocrystal nonvolatile memory based on strained silicon and manufacturing method of memory

The invention relates to a nanocrystal nonvolatile memory based on strained silicon in the technical fields of nano electronic components and nano processing. The nanocrystal nonvolatile memory based on strained silicon comprises a silicon substrate, a GeSi gradually-doped buffer layer, a Gel-xSix relieving layer, a strained silicon layer, lightly-doped drain electrodes, a source conduction region, a drain conduction region, a tunneling dielectric layer, a nanocrystal charge storage layer, a control grid dielectric layer and a grid electrode material layer, wherein the GeSi gradually-doped buffer layer, the Gel-xSix relieving layer and the strained silicon layer are deposited on the silicon substrate; the lightly-doped drain electrodes, the source conduction region and the drain conduction region are arranged at two sides in the silicon substrate; the tunneling dielectric layer covers a current carrier channel arranged between the source conduction region and the drain conduction region; the nanocrystal charge storage layer covers the tunneling dielectric layer; the control grid dielectric layer covers the tunneling dielectric layer; and the grid electrode material layer covers the control grid dielectric layer. According to the invention, the mobility is increased by utilizing the strained silicon, thereby increasing the reading current, and simplifying a peripheral circuit; the nanocrystal nonvolatile memory based on strained silicon adopts the nanocrystal as a floating grid material, so that the performance of a storage device is improved, and particularly, the storage performance, such as storage windows, programming/erasing speed, data retention characteristic and the like, is improved comprehensively.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Forming method for memory cell of flash memory

The invention discloses a forming method for a memory cell of a flash memory. The forming method comprises the steps of: providing a semiconductor substrate; forming a first insulating layer on the surface of the semiconductor substrate; forming a floating gate polycrystalline silicon layer on the surface of the first insulating layer; forming a stress layer on the surface of the floating gate polycrystalline silicon layer; after the forming of the stress layer, conducting thermal annealing on the stress layer, the floating gate polycrystalline silicon layer, the first insulating layer and the semiconductor substrate; after thermal annealing, removing the stress layer; after the removal of the stress layer, forming a source line layer passing through the floating gate polycrystalline silicon layer and the first insulating layer on the surface of the semiconductor substrate; and removing part of the floating gate polycrystalline silicon layer and forming a floating gate layer on the surface of the first insulating layer on two sides of the source line layer, wherein the floating gate layer is electrically isolated from the source line layer. The forming method for the memory cell of the flash memory can retain stress inside the floating gate layer, thereby enhancing the channel carrier mobility of the memory cell of the flash memory and reducing the size of the memory cell of the flash memory simultaneously when improving the data retention.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Method for forming shallow trench isolation (STI) structure used for flash memory

The invention provides a method for forming a shallow trench isolation (STI) structure used for improving the 'smiling face' effect of a flash memory. The method comprises the following steps: providing a semiconductor substrate, wherein a tunneling oxidization layer and a floating gate polycrystalline silicon layer are sequentially formed on the surface of the semiconductor substrate; forming a hard mask layer on the surface of the floating gate polycrystalline silicon layer, sequentially etching the hard mask layer, the floating gate polycrystalline silicon layer, the tunneling oxidization layer and the semiconductor substrate, and forming a shallow trench in the semiconductor substrate; adopting in-situ steam generation process to form a liner oxidization layer covering the surface of the shallow trench; and adopting chemical vapor deposition to form an isolation medium layer filling the shallow trench. Through the STI structure forming method for the flash memory, the smiling face problem of the floating gate tunneling oxide caused by the traditional process can be effectively solved, the programming and erasure efficiency of the flash memory can be improved, and the read current of the flash memory in an erasure state can be increased, thus achieving the purpose of increasing a memory window.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Three-dimensional groove type ferroelectric memory and preparation method thereof

The invention discloses a three-dimensional groove type ferroelectric memory and a preparation method thereof. The three-dimensional groove type ferroelectric memory comprises a substrate (1) and a conductive layer (2) arranged on the substrate (1). A laminated structure arranged on the conductive layer (2) comprises a plurality of horizontal isolation layers (3) and control gate electrodes (4) which are arranged in an overlapping manner. The plurality of trench-type memory cell strings (5) vertically penetrate through the laminated structure, and each trench-type memory cell string (5) comprises a trench hole (11) which vertically penetrates through the laminated structure and has a trench bottom embedded into the conductive layer (2). A buffer layer (6), a ferroelectric film layer (7), achannel layer (8) and a filling layer (9) are sequentially laid on the side wall and the groove bottom of the groove hole (11). The control gate electrode (4), the buffer layer (6), the ferroelectricfilm layer (7) and the channel layer (8) form a plurality of ferroelectric field effect transistors which are connected in series. According to the ferroelectric memory, more compact wiring can be obtained, and higher-density integration can be realized; during preparation, required materials are sequentially deposited, etching is not needed, and the reliability of the ferroelectric memory is ensured.
Owner:XIANGTAN UNIV

Method for forming shallow trench isolation structure for flash memory

The invention provides a method for forming a shallow trench isolation (STI) structure used for improving the 'smiling face' effect of a flash memory. The method comprises the following steps: providing a semiconductor substrate, wherein a tunneling oxidization layer and a floating gate polycrystalline silicon layer are sequentially formed on the surface of the semiconductor substrate; forming a hard mask layer on the surface of the floating gate polycrystalline silicon layer, sequentially etching the hard mask layer, the floating gate polycrystalline silicon layer, the tunneling oxidization layer and the semiconductor substrate, and forming a shallow trench in the semiconductor substrate; adopting in-situ steam generation process to form a liner oxidization layer covering the surface of the shallow trench; and adopting chemical vapor deposition to form an isolation medium layer filling the shallow trench. Through the STI structure forming method for the flash memory, the smiling face problem of the floating gate tunneling oxide caused by the traditional process can be effectively solved, the programming and erasure efficiency of the flash memory can be improved, and the read current of the flash memory in an erasure state can be increased, thus achieving the purpose of increasing a memory window.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Method for manufacturing and using horizontal electrode configuration structure of nanoscale phase change memory unit

The invention discloses a method for manufacturing and using a horizontal electrode configuration structure for a nanoscale phase-change memory unit. The lower phase-change material layer and the upper electrode material layer are grown sequentially according to the procedures; during processing, the upper electrode material layer is based on the same process. The photolithography process forms the upper electrode of the outer ring common drain ground and the upper electrode of the inner source end; when in use, the upper layer electrode of the inner source end is connected to the source end, and the upper layer electrode of the outer ring common drain ground is common drain ground, and the source and drain end cannot be exchanged, and the current flows from The equipotential surface of the upper layer electrode at the inner source end flows horizontally to the outer ring equipotential surface of the outer ring common drain grounding upper layer electrode. For the high-resistance amorphous state, compared with the square structure, the equivalent resistance value R is significantly reduced, and the read current is increased, which is convenient for correct reading. Moreover, the horizontal flow of current reduces the current loss of elements connected in series at both ends in a general sense, thereby reducing the threshold current required for the amorphization process and reducing the overall power consumption.
Owner:HUAZHONG UNIV OF SCI & TECH

Three-dimensional semiconductor device and manufacturing method thereof

The invention discloses a three-dimensional semiconductor device which comprises multiple storage units. Each storage unit comprises a channel layer, multiple interlayer insulating layers, multiple grid electroconductive layers, a grid dielectric layer, a drain electrode and a source electrode, each channel layer is distributed along a direction perpendicular to the surface of a substrate, the interlayer insulating layers and the grid electroconductive layers are alternately stacked along the side wall of the corresponding channel layer, each grid dielectric layer is positioned between the interlayer insulating layers and the side wall of the corresponding channel layer, each drain electrode is positioned at the top of the corresponding channel layer, each source electrode is positioned in the substrate between two adjacent storage units, and multiple second grid dielectric layers and multiple second channel layers are further arranged around each storage unit. According to the three-dimensional semiconductor device and a manufacturing method thereof, a current passage formed by stacking auxiliary MOSFET strings (metal oxide semiconductor field effect transistor) is formed around a vertical channel, and on-state current and electrorheology of storage strings are increased effectively, so that reading current and reading speed of a storage array are increased.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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