The invention provides a nanoelectrode preparation method of a two-dimensional material
memristor, and relates to the technical field of
semiconductor device preparation, and the method comprises the steps: carrying out the
spin coating of a PMMA
diluent on a substrate, carrying out the
electron beam
exposure, carrying out the low-temperature development, and forming a patterned bottom
contact electrode; performing
physical vapor deposition,
photoresist removal and stripping on the patterned bottom
contact electrode to obtain a bottom
contact electrode; preparing an insulating layer on the substrate for preparing the bottom contact
electrode by using an
atomic layer deposition mode;
copper substrate
etching is carried out on the two-dimensional material with the
copper substrate, and the two-dimensional material with the
copper substrate is transferred to the position above the insulating layer; performing patterning treatment on the transferred two-dimensional material to obtain a patterned two-dimensional material
electrode; pMMA
diluent is spin-coated on the surface of the substrate after patterning of the two-dimensional material,
electron beam
exposure and low-temperature development are carried out after baking and glue solidification, and a patterned top contact
electrode is formed; and performing
physical vapor deposition on the patterned top contact electrode to obtain the top contact electrode. The size of the device can be greatly reduced, and the performance uniformity of the device is improved.