The application discloses a manufacturing method of a
ceramic micro-flow channel carrier for high-power devices and relates to the field of ceramics. The manufacturing method comprises the following steps: after
punching a green
ceramic sheet,
tungsten slurry is used to fill the holes and conductor patterns are printed on the surface of the green
ceramic sheet; then, a bottom plate micro-flow channel layer is laminated and a sacrificial material is filled in the micro-flow channel cavities; then, the bonding interface between the cover plate and the bottom plate is subjected to
ultraviolet laser roughening treatment; then, two-step isostatic pressing forming treatment is performed; after
cutting into a bar, the bar is subjected to glue removal,
sintering,
hot pressing leveling,
grinding,
polishing and seed layer deposition; then,
exposure development is performed and the line layer is thickened by
electroplating; then, secondary
photolithography processing is performed on the
chip eutectic area to open a window; finally, gold
tin evaporation treatment, stripping of the
photoresist and
cutting are performed, so that the ceramic micro-flow channel carrier for high-power devices is obtained. According to the specific manufacturing process, the
mechanical strength, the
dielectric property, the heat
fatigue resistance and the micro-flow channel
pressure resistance are improved while the heat dissipation property is maintained.