Jet-printing head based on double-carbon nanotube microbubble generator and preparation method thereof
A technology of micro-bubble generator and carbon nanotubes, which is applied in printing and other directions, can solve the problems of high power consumption and achieve low power consumption, high integration density and wide application prospects
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Embodiment 1
[0081] (1) Use glass as the cover plate 2. Surface treatment and cleaning of the glass cover plate;
[0082] (2) Prepare the carbon nanotube microbubble generator on the cover plate 2. The process is:
[0083] (2.1) Use electron beam to evaporate titanium to form a titanium film with a thickness of 20nm;
[0084] (2.2) Use electron beam to evaporate gold to form a gold film with a thickness of 400nm;
[0085] (2.3) The gold electrodes 11 and 12 are formed using the existing lift-off process (lift~off), and the distance between the gold electrodes 11 and 12 is 5 μm;
[0086] (2.4) Mix the carbon nanotubes 13 with a diameter of 10-30nm with the absolute ethanol solvent at a ratio of 0.01mg / ml, and then uniformly disperse the carbon nanotubes by ultrasound;
[0087] (2.5) Load 1MHz, 8V AC voltage between the gold electrodes 11 and 22 on the cover plate 2, and use a micro syringe to drop the carbon nanotube suspension between the electrodes. When the solvent is completely evaporated, the car...
Embodiment 2
[0132] (1) Use glass as cover plate 2, and perform surface treatment and cleaning on cover plate 2;
[0133] (2) Prepare the carbon nanotube microbubble generator on the cover plate 2. The process is:
[0134] (2.1) Sputtering titanium is used to form a titanium film with a thickness of 30nm;
[0135] (2.2) Sputtering gold is used to form a gold film with a thickness of 300nm;
[0136] (2.3) The gold electrodes 11 and 12 are formed by the existing lift-off process (lift~off), and the distance between the gold electrodes 11 and 12 is 1 μm;
[0137] (2.4) Mix the carbon nanotubes 13 with a diameter of 10-30nm and anhydrous ethanol solvent at a ratio of 0.005mg / ml, and make the carbon nanotubes uniformly dispersed by ultrasound;
[0138] (2.5) Load 0.5MHz, 5V AC voltage between the gold electrodes 11 and 12 on the cover plate 2, and use a micro syringe to drop the carbon nanotube suspension between the electrodes. When the solvent is completely evaporated, the carbon nanotubes will Connect...
Embodiment 3
[0157] (1) Use glass as cover plate 2, and perform surface treatment and cleaning on cover plate 2;
[0158] (2) Prepare the carbon nanotube microbubble generator on the cover plate 2. The process is:
[0159] (2.1) Sputtering titanium is used to form a titanium film with a thickness of 30nm;
[0160] (2.2) Sputtering gold is used to form a gold film with a thickness of 300nm;
[0161] (2.3) The gold electrodes 11 and 12 are formed using the existing lift-off process (lift~off), and the distance between the gold electrodes 11 and 12 is 10 μm;
[0162] (2.4) Mix the carbon nanotubes 13 with a diameter of 10-30nm and anhydrous ethanol solvent at a ratio of 0.05mg / ml, and make the carbon nanotubes uniformly dispersed by ultrasound;
[0163] (2.5) Apply a 0.8MHz, 10V AC voltage between the gold electrodes 31 and 32 on the glass substrate 1, and use a micro syringe to drop the carbon nanotube suspension between the electrodes. When the solvent is completely evaporated, the carbon nanotubes wi...
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