Optical right-angle reflector and manufacture method thereof
A right-angle reflector and a manufacturing method are applied in the fields of optics and semiconductor technology, and can solve the problems of inability to return to the original path, and achieve the effects of low price, reduced weight, and high manufacturing precision.
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[0042] The embodiment of the present application provides a method for manufacturing an optical right-angle mirror, which is used to manufacture an optical right-angle mirror on a single crystal silicon substrate.
[0043] figure 1 Is a schematic diagram of the manufacturing method of the optical right-angle mirror, such as figure 1 As shown, the manufacturing method includes:
[0044] S101, forming an etching mask on the surface of the substrate, the etching mask having an opening that exposes the surface of the substrate, and the substrate is a single crystal silicon wafer;
[0045] S102. Perform wet etching on the substrate on which the etching mask is formed to form an engraved groove. The engraved groove has at least two mutually perpendicular sidewalls, and the two sidewalls are monocrystalline silicon (110) Crystal plane; and
[0046] S103. Cover the two side walls of the groove with a light reflection layer to form a right-angle mirror on the surface of the gro...
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