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Preparation method of light trapping glass for thin film solar cell

A solar cell and thin film technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as affecting the performance of thin films, and achieve the effects of good crystal quality, high activity, and good hydrophilicity

Inactive Publication Date: 2018-10-12
(CNBM) BENGBU DESIGN & RES INST FOR GLASS IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] AZO thin film is a kind of transparent conductive film, which exhibits good transparent conductive properties at an appropriate doping concentration, but currently only one kind of doping concentration target is used to prepare the obtained AZO monolayer film, and it needs to be heated to AZO film with better photoelectric performance is prepared, which affects the performance of the film

Method used

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  • Preparation method of light trapping glass for thin film solar cell
  • Preparation method of light trapping glass for thin film solar cell

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Such as figure 1 Shown, the present invention provides a kind of preparation method of light-trapping glass for thin-film solar cell, comprises the following steps:

[0029] S1. Immerse the glass substrate 1 in the piranha solution. The piranha solution is a mixed solution of 70% concentrated sulfuric acid and 30% hydrogen peroxide, clean the glass substrate, remove impurities on the surface of the glass substrate, and simultaneously hydroxylate the surface of the glass substrate to improve its affinity. Water-based, so that the sputtering of subsequent thin films has better bonding and adhesion;

[0030] S2, placing the glass substrate 1 in a magnetron sputtering chamber, bombarding the surface of the glass substrate 1 with an Ar ion beam to further clean the glass substrate, enhancing the hydrophilicity of the surface of the glass substrate and stimulating the surface activity of the glass substrate;

[0031] S3. Use the AZO target with an Al doping concentration of ...

Embodiment 2

[0037] Such as figure 1 Shown, the present invention provides a kind of preparation method of light-trapping glass for thin-film solar cell, comprises the following steps:

[0038] S1. Immerse the glass substrate 1 in the piranha solution. The piranha solution is a mixed solution of 70% concentrated sulfuric acid and 30% hydrogen peroxide, clean the glass substrate, remove impurities on the surface of the glass substrate, and simultaneously hydroxylate the surface of the glass substrate to improve its affinity. Water-based, so that the sputtering of subsequent thin films has better bonding and adhesion;

[0039] S2, placing the glass substrate 1 in a magnetron sputtering chamber, bombarding the surface of the glass substrate 1 with an Ar ion beam to further clean the glass substrate, enhancing the hydrophilicity of the surface of the glass substrate and stimulating the surface activity of the glass substrate;

[0040] S3. Use the AZO target with Al doping concentration of 1.0...

Embodiment 3

[0046] Such as figure 1 Shown, the present invention provides a kind of preparation method of light-trapping glass for thin-film solar cell, comprises the following steps:

[0047] S1. Immerse the glass substrate 1 in the piranha solution. The piranha solution is a mixed solution of 70% concentrated sulfuric acid and 30% hydrogen peroxide, clean the glass substrate, remove impurities on the surface of the glass substrate, and simultaneously hydroxylate the surface of the glass substrate to improve its affinity. Water-based, so that the sputtering of subsequent thin films has better bonding and adhesion;

[0048] S2, placing the glass substrate 1 in a magnetron sputtering chamber, bombarding the surface of the glass substrate 1 with an Ar ion beam to further clean the glass substrate, enhancing the hydrophilicity of the surface of the glass substrate and stimulating the surface activity of the glass substrate;

[0049] S3. Use the AZO target with an Al doping concentration of 1....

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Abstract

The invention discloses a preparation method of light trapping glass for a thin film solar cell. The method comprises the following steps: S1, immersing a glass substrate into a piranha solution and cleaning the glass substrate; S2, placing the glass substrate in a magnetron sputtering cavity, and adopting Ar ion beams to bombard the surface of the glass substrate for further cleaning of the glasssubstrate; S3, adopting an AZO target with Al dosage concentration being 0.5wt%-1.5wt% as a target material, and growing a first AZO thin film by sputtering with a radio-frequency and direct-currentcoupled sputtering technology; S4, adopting an AZO target with Al dosage concentration being 1.5wt%-2.5wt% as a target material, and growing a second AZO thin film by sputtering with the radio-frequency and direct-current coupled sputtering technology; S5, adopting an Ag target material, and growing an Ag thin film by sputtering with the radio-frequency and direct-current coupled sputtering technology; S6, adopting an AZO target with Al dosage concentration being 2.5wt%-3.5wt% as a target material, and growing a third AZO thin film by sputtering with the radio-frequency and direct-current coupled sputtering technology. With adoption of the method, haze and electrical properties of the light trapping glass can be improved, and AZO transparent conducting glass with high light transmittance and a light trapping function can be obtained.

Description

technical field [0001] The invention relates to the field of glass manufacturing, in particular to a method for preparing light-trapping glass for thin-film solar cells. Background technique [0002] In recent years, zinc oxide (ZnO)-based transparent conductive films have attracted much attention. Typical applications include flexible electronic products, silicon-based thin-film solar cells, flat panel displays, etc. There are many doping elements to improve the conductivity of ZnO, but aluminum doping is one of the most promising. [0003] AZO thin film is a kind of transparent conductive film, which exhibits good transparent conductive properties at an appropriate doping concentration, but currently only one kind of doping concentration target is used to prepare the obtained AZO monolayer film, and it needs to be heated to The AZO film with better photoelectric performance is prepared, which affects the performance of the film. Contents of the invention [0004] The ...

Claims

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Application Information

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IPC IPC(8): C03C17/36H01L31/0236
CPCC03C17/3644C03C17/3657C03C2217/734C03C2218/156H01L31/02366Y02E10/50
Inventor 彭寿姚婷婷沈洪雪李刚杨勇金克武王天齐汤永康甘治平马立云
Owner (CNBM) BENGBU DESIGN & RES INST FOR GLASS IND CO LTD
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