The invention discloses a characterization method for
conductivity regulation in a ferroelectric nano
dot array, and belongs to the technical field of nano ferroelectric material preparation and micro-nano characterization. A ferroelectric film is etched by an
ion beam to obtain a high-density nano
dot array;
a domain structure of a ferroelectric topological domain is obtained by means of vector piezoelectric power
microscopy characterization; a conductive atomic force
microscope is used for observing conductive channels in the nanodots, that the conductive area in a single
nanodot is dozens of nanometers according to a two-dimensional current image, and the conductive channels have the characteristic similar to
metal conductivity; and a piezoelectric force
microscope and a conductive atomic force
microscope are combined to obtain regulation of polarization on
conductivity. The method can be used for developing a nonvolatile and high-density ferroelectric
random access memory; the central domain structure of the
nanodot provides a scheme for researching the ferroelectric topological domain and a topological material; and the conductivity of the nanodots can be regulated through polarization inversion, regulation control can be visualized through the provided characterization method, and the
visibility and reliability of data are improved.