Nanoscale electrode processing method based on AFM (atomic force microscopy)
An electrode processing and nano-electrode technology, which is applied in the fields of nanotechnology, nanotechnology, nanostructure manufacturing, etc., can solve the problems of difficult to obtain cutting-edge electrodes, no records of nano-scale electrodes, and difficulty in meeting detection requirements for electrodes, and achieves easy operability. , the effect of low cost
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[0021] The working status of the present invention is as figure 1 As shown, 1 is PZT, 2 is AFM cantilever beam, 3 is gold electrode, 4 is silicon dioxide, and 5 is probe.
[0022] 1) Determine the relationship between cutting depth and PSD signal: as figure 1 , figure 2 As shown, the probe 5 processes a nano-channel 7 on the substrate, and at the same time divides the gold electrode 3 into a pair. In order to determine the cutting depth, it is first necessary to determine the relationship between the cutting depth and the PSD signal: for a silicon dioxide substrate in several Nano-channels with a certain depth are processed under different PSD voltage values (from small to large), and the processed nano-channels are scanned and imaged, and the depth values corresponding to different PSD signals are measured, and the fitting results are as follows: image 3 The graph of the relationship between voltage and depth is shown;
[0023] 2) Processing of nanochannels: Assuming...
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