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Single Diaphragm Transducer Structure

A technology of transducers and tension structures, which is applied to semiconductor electrostatic transducers, electrostatic transducers, microphones, instruments, etc., and can solve problems such as limited sensitivity and signal interference

Active Publication Date: 2018-08-14
INFINEON TECH AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Typically, the sensitivity of these transducer systems is limited by signal interference in the form of electrical noise from various sources

Method used

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  • Single Diaphragm Transducer Structure
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  • Single Diaphragm Transducer Structure

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Embodiment Construction

[0012] The following detailed description refers to the accompanying drawings, which show, by way of illustration, specific details and embodiments in which the invention may be practiced.

[0013] The word "exemplary" is used herein to mean "serving as an example, instance, or illustration." Any embodiment or design described herein as "exemplary" is not necessarily to be construed as preferred or preferred over other embodiments or designs.

[0014] The word "over" used with respect to a deposited material formed "over" a side or surface, may be used herein to mean that the deposited material may be formed "directly on" such as In direct contact with the indicated side or surface. The word "over" used with respect to deposited material formed "over" a side or surface, may be used herein to mean that the deposited material may be formed "indirectly on" to One or more further layers are arranged between the indicated side or surface and the deposited material.

[0015] In v...

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PUM

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Abstract

A transducer structure is disclosed that includes a carrier having an opening and a suspension structure mounted on the carrier and extending at least partially over the opening of the carrier. The transducer structure may further comprise configuring the suspension structure to provide an electrostatic field between the suspension structure and the carrier by varying the distance between the suspension structure and the carrier. Alternatively, the suspension structure may be configured to vary the distance between the suspension structure and the carrier in response to an electrostatic force provided between part of the suspension structure and the carrier.

Description

technical field [0001] Various embodiments generally relate to transducer structures that may include diaphragm structures and are capable of generating and / or measuring a given electrostatic field. Background technique [0002] Many conventional transducers convert membrane motion into a voltage proportional to the magnitude of diaphragm deflection. Typically, the sensitivity of these transducer systems is limited by signal interference in the form of electrical noise from various sources. For example, in conventional condenser microphones, some sources of signal interference may include one or more of the following: the size of the sound inlet opening in the microphone housing; airflow through the capacitor gap; and transducer circuitry of impedance. Contents of the invention [0003] In various embodiments, a transducer structure is provided. The transducer structure may comprise a carrier having an opening and a suspension structure mounted on the carrier and extend...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R19/04
CPCG01L9/0042G01R29/12G01L9/0073H04R19/005H04R19/04H04R2201/003G01L1/14
Inventor A·德厄C·格拉策
Owner INFINEON TECH AG