Humidity sensor, humidity sensor array and preparation method thereof

A humidity sensor and array technology, applied in the direction of material resistance, can solve the problems of inability to distinguish the composition and content of other gases, humidity sensor moisture-sensitive materials or sensitive films cannot respond quickly, etc., to improve service life, performance recovery, and response range Enhanced effect

Inactive Publication Date: 2015-09-16
SHENZHEN GONGJIN ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the existing moisture sensing materials or sensitive films of humidity sensors cannot respond quickly, nor can they distinguish the composition and content of other gases in the air or ambient gases

Method used

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  • Humidity sensor, humidity sensor array and preparation method thereof
  • Humidity sensor, humidity sensor array and preparation method thereof
  • Humidity sensor, humidity sensor array and preparation method thereof

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Embodiment Construction

[0050]In order to make the object, technical solution and advantages of the present invention clearer, various embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. However, those of ordinary skill in the art can understand that, in each implementation manner of the present invention, many technical details are provided for readers to better understand the present application. However, even without these technical details and various changes and modifications based on the following implementation modes, the technical solution claimed in each claim of the present application can be realized.

[0051] A first embodiment of the present invention relates to a humidity sensor. The specific structure is as Figure 1a , 1b and figure 2 shown. The humidity sensor includes: a substrate 10 , a metal electrode 20 and a sensitive film 30 , wherein both the metal electrode 20 and the sensitive film 30 are formed on the sub...

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Abstract

The invention relates to the field of sensor manufacturing and discloses a humidity sensor, a humidity sensor array and a preparation method thereof. According to the humidity sensor, a piece of sensitive thin film in the humidity sensor includes oxidized graphene, the oxidized graphene is capable of enabling the response time to be greatly reduced, enabling the response amplitude to be improved and analyzing the environment humidity and environment gas ingredients, and moreover, the structure is simple, the preparation is easy to realize, and the cost is low.

Description

technical field [0001] The invention relates to the field of sensor manufacturing, in particular to a humidity sensor, a humidity sensor array and a preparation method thereof. Background technique [0002] In the departments of industrial and agricultural production, meteorology, environmental protection, national defense, scientific research, aerospace and other departments, people often need to measure and control the humidity of the environment. Human survival and social activities are closely related to humidity. With modernization, it can be difficult to identify an area that has nothing to do with humidity. Due to different application fields, the technical requirements for humidity sensors are also different. [0003] The humidity sensor based on electrical properties is the simplest humidity sensor, which mainly includes two types: resistive and capacitive. The characteristic of the humidity sensitive resistor is that a film made of moisture-sensitive material is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
Inventor 唐佛南吴东平文宸宇叶强强
Owner SHENZHEN GONGJIN ELECTRONICS CO LTD
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